Spectrally selective infrared detector based on an ultra-thin piezoelectric resonant metamaterial

Huang, Yu; Rinaldi, Matteo

doi:10.1109/memsys.2015.7051126

Cited by 3 publications

(3 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The nanoplate is released from the silicon (Si) substrate to vibrate freely, and it is mechanically supported by two ultrathin Pt tethers (100-nm-thick, 6.5-μm-wide and 20-μm-long), which also provide electrical contact 36 . Such Pt tethers greatly improve the thermal isolation between the nanoplate and the Si substrate compared with conventional ones composed of an AlN–Pt stack 37 . The mechanical resonance frequency of the plasmonic piezoelectric resonator is defined by the equivalent Young's modulus E eq and density ρ eq of the resonant material stack, and the pitch of the interdigitated electrode W 0 (electrode width plus spacing, see Fig.…”

Section: Resultsmentioning

confidence: 99%

Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing

et al. 2016

Self Cite

View full text Add to dashboard Cite

Ultrathin plasmonic metasurfaces have proven their ability to control and manipulate light at unprecedented levels, leading to exciting optical functionalities and applications. Although to date metasurfaces have mainly been investigated from an electromagnetic perspective, their ultrathin nature may also provide novel and useful mechanical properties. Here we propose a thin piezoelectric plasmonic metasurface forming the resonant body of a nanomechanical resonator with simultaneously tailored optical and electromechanical properties. We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate. The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities. These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

show abstract

Section: Resultsmentioning

confidence: 99%

Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing

et al. 2016

Self Cite

View full text Add to dashboard Cite

show abstract

“…Furthermore, the microfabrication of AlN resonant devices is post-CMOS-compatible [15], enabling the integration capability of CMOS readout electronics with AlN resonant sensors on the same substrate, thus improving performance and reducing size, cost, and power consumption. Uncooled MEMS/NEMS resonant IR detectors based on AlN resonators [13], [16]- [18] and oscillators [19]- [21] have been recently demonstrated and show promising performance. Nevertheless, a fundamental challenge associated to the implementation of high performance MEMS resonant IR detectors for MWIR imaging systems is the integration of efficient MWIR absorbing materials that are also compatible with conventional transduction and microfabrication techniques.…”

Section: Introductionmentioning

confidence: 99%

Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

Huang

Kang

Qian

et al. 2021

J. Microelectromech. Syst.

Self Cite

View full text Add to dashboard Cite

This article reports on the first demonstration of a high resolution (∼1.9 nW/Hz 1/2 measured in 200 Hz bandwidth) and fast (∼5.3 ms) uncooled Infrared (IR) detector based on a high frequency (172 MHz) aluminum nitride nano-plate piezoelectric fishnet-like metasurface (PFM). For the first time, an ultrathin (650 nm) piezoelectric fishnet-like metasurface is employed to form the vibrating body of a nanoelectromechanical resonator with a unique combination of optical, thermal and electromechanical properties. Sensing and actuation of a high frequency and high electromechanical performance (quality factor, Q ∼2254 and electromechanical coupling coefficient, k 2 t ∼1.4%) bulk acoustic mode of vibration in the free-standing ultrathin structure is achieved thanks to the superior piezoelectric transduction properties of the proposed metasurface. Strong absorption (60%) of mid wavelength infrared (MWIR) radiation in the ultra-low volume resonant device is obtained thanks to the properly engineered optical properties of the fishnet-like metasurface which provide multiple plasmonic resonances at 3-5 µm to the structure. The demonstrated resonant PFM detector technology marks a milestone towards the implementation of a new class of high performance, miniaturized and low power MWIR imaging systems.

show abstract

“…With a proper selection of the mode at vacuum ambient, it is possible to achieve high quality factors of around 65 000 [4]. FBAR resonators that are utilized as IR detectors [5] have a quality factor of around 1400. In another bulk acoustic wave resonator application [6], a MEMS resonator is used as an IR sensor, which is based on the shift of the resonance frequency due to the incident IR radiation.…”

Section: Introductionmentioning

confidence: 99%

A MEMS square Chladni plate resonator

Pala

Azgın

2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper presents the design, fabrication and tests of a micro-fabricated MEMS ‘Chladni’ plate resonator. The proposed MEMS resonator has a square plate geometry having a side length of 1400 µm and a height of 35 µm. Its geometry and electrode layout are designed to analyze and test as many modes as possible. The MEMS plate is fabricated using a silicon-on-insulator process with a 35 µm thick silicon layer on a glass substrate. Transverse vibration of the plate is investigated to obtain closed form natural frequencies and mode shapes, which are derived using the Rayleigh–Ritz energy method, with an electrostatic softening effect included. Closed form equations for the calculation of effective stiffness’, masses and natural frequencies of the two modes (mode (1,1) and mode (2,0)–(0,2)) are presented, with and without electrostatic softening. The analytical model is verified for those modes by finite-element simulations, frequency response tests in vacuum and laser Doppler vibrometer (LDV) experiments. The derived model deviates from the finite-element analysis by 3.35% for mode (1,1) and 6.15% for mode (2,0)–(0,2). For verification, the frequency responses of the plates are measured with both electrostatic excitation-detection at around 20 mTorr vacuum ambient and LDV at around 0.364 mTorr vacuum ambient. The resonance frequency and Q-factor of mode (1,1) are measured to be 104.2 kHz and 14 300, respectively. For mode (2,0)–(0,2), the measured resonance frequency and Q-factor are 156.68 kHz and 10 700, respectively. The presented LDV results also support both natural frequencies of interest and corresponding mode shapes of the plate structure.

show abstract

Spectrally selective infrared detector based on an ultra-thin piezoelectric resonant metamaterial

Cited by 3 publications

References 10 publications

Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing

Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing

Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

A MEMS square Chladni plate resonator

Contact Info

Product

Resources

About