Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Mol, L.; Rocha, Licinio; Cretu, Edmond; Wolffenbuttel, R.F.

doi:10.1109/sensor.2009.5285840

Cited by 13 publications

(7 citation statements)

References 11 publications

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“…There are several types of flow regimes for the thin air film and are generally classified depending on a dimensionless value called the Knudsen number,

, which is defined as the ratio of the mean free path of air to the thickness of the air gap, and is given as:

where

is the mean free path of air at a given operating temperature and pressure and

is the nominal air gap thickness. The mean free path of the air can be calculated as [ 32 ]:

where

is the air viscosity at atmospheric pressure,

is the mass of air,

is the air pressure,

is the air temperature and

is the Boltzman constant. The classification of flow regimes based on the

values are discussed in [ 33 ].…”

Section: Analytical Modeling Of the Multi-dof Mems Gyroscopementioning

confidence: 99%

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

et al. 2020

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This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS processes (SOIMUMPs), with silicon as a structural material. The proposed design consists of a 3-DoF drive mode oscillator with the concept of addition of a collider mass which transmits energy from the drive mass to the passive sense mass. In the sense direction, 2-DoF sense mode oscillator is used to achieve dynamically-amplified displacement in the sense mass. A detailed analytical model for the dynamic response of MEMS gyroscope is presented and performance characteristics are validated through finite element method (FEM)-based simulations. The effect of operating air pressure and temperature variations on the air damping and resulting dynamic response is analyzed. The thermal stability of the design and corresponding effect on the mechanical and capacitive sensitivity, for an operating temperature range of −40 °C to 100 °C, is presented. The results showed that the proposed design is thermally stable, robust to environmental variations, and process tolerances with a wide operational bandwidth and high sensitivity. Moreover, a system-level model of the proposed gyroscope and its integration with the sensor electronics is presented to estimate the voltage sensitivity under the constraints of the readout electronic circuit.

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“…There are several types of flow regimes for the thin air film and are generally classified depending on a dimensionless value called the Knudsen number,

, which is defined as the ratio of the mean free path of air to the thickness of the air gap, and is given as:

where

is the mean free path of air at a given operating temperature and pressure and

is the nominal air gap thickness. The mean free path of the air can be calculated as [ 32 ]:

where

is the air viscosity at atmospheric pressure,

is the mass of air,

is the air pressure,

is the air temperature and

is the Boltzman constant. The classification of flow regimes based on the

values are discussed in [ 33 ].…”

Section: Analytical Modeling Of the Multi-dof Mems Gyroscopementioning

confidence: 99%

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

et al. 2020

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“…In recent times, the uses of microfluidic devices are gaining a lot of popularity, especially in medical applications and taking care of squeeze film effect during the modeling of these devices is significant to obtain a detailed dynamics of pull-in behaviors. The combined viscous as well as a solid mechanical model for both incompressible and compressible fluids have discussed in Keating and Ho 33 and Mol et al 34 Chaterjee and Pohit 35 analyzed the static and dynamic pull-in voltage of a cantilever microbeam actuated by a coexistence of DC/AC voltage in the presence of squeezefilm damping.…”

Section: Introductionmentioning

confidence: 99%

Electrostatic pull-in analysis of a nonuniform micro-resonator undergoing large elastic deflection

Prasanth

Harsha

Pratiher

2017

Proceedings of the Institution of Mechanical Engineers, Part C:

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Pull-in analysis of an electrostatically actuated nonuniform micro-resonator under large elastic deflection has been investigated with a focus on qualitative analysis to understand the essence of nonuniform cross-section on the determination of pull-in voltage. Here, a microcantilever beam with nonuniform cross-section has been adopted to develop a mathematical model considering the important features such as structural nonlinearities, nonlinear electrostatic distribution, and linear viscous effect. The individual effect of each design variables on the diagnosis of the critical voltage and corresponding critical deflection due to pull-in has been graphically depicted. The results in the static condition have been verified with the findings obtained via COMSOL multi-physics software. Present result indicates that a nonuniform microbeam configuration strengthens the structural stability by switching the pull-in voltage up to a higher value. Similarly, stable pull-in deflection within the restriction of pull-in instability has been also augmented. In addition, it has been shown that the nonuniformity within the beam structure is highly sensitive to the nonlinear effects. Hence, outputs provide a useful insight of pull-in behavior and enable an understanding of safe and smooth operating range of microelectromechanical system devices.

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“…Fabrication and electronic modulation of a resonator with such a narrow air gap between the two mirrors is severely hindered by capillary forces inside of the cavity. Also, electrostatic pull-in and subsequent sticking of the two mirrors limits the operating range of the device to one third of the initial air gap [7,8].…”

Section: Introductionmentioning

confidence: 99%

Linear variable optical filter-based ultraviolet microspectrometer

Emadi

Graaf

et al. 2012

Appl. Opt.

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An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

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Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Cited by 13 publications

References 11 publications

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

Electrostatic pull-in analysis of a nonuniform micro-resonator undergoing large elastic deflection

Linear variable optical filter-based ultraviolet microspectrometer

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