Stable zipping RF MEMS varactors

Pu, Suan Hui; Holmes, Andrew S.; Yeatman, Eric M.; Papavassiliou, Christos; Lucyszyn, S.

doi:10.1088/0960-1317/20/3/035030

Cited by 14 publications

(8 citation statements)

References 33 publications

(48 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For validation, we applied the model to problems described in the literature and compared our results with the calculations, FEM simulations and measurements in the publications of [15,23,32]. It must be noted that the problem of cantilever bending with large initial deflection and surface interaction during roll-down has been rarely discussed in the literature.…”

Section: Numerical Resultsmentioning

confidence: 99%

“…where D is the thickness of the dielectric. The area density of the tensile force on sub-beam k can be determined by As can be seen by inspection of equation (15), the external torque in node i is dependent on the relative inclination angle Φ k between the sub-beams and thus the voltage-dependent bending of the electrode beam. In other words, the shape of the electrode beam must be known for the calculation of the torque.…”

Section: ( )mentioning

confidence: 99%

“…Stress-deformed cantilevers are used as passive components in applications like flow sensing [10,11] or as active components with electric actuation in applications such as e.g. radio frequency (RF) switching [12,13], RF varactors [14,15], switchable metamaterials [16][17][18][19][20][21], and large micromirrors [5].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Semi-analytic model for the calculation of large-angle bending of electrostatically actuated cantilevers

2020

View full text Add to dashboard Cite

This work presents an electromechanical, semi-analytic model for the description of the bending and electrostatic actuation of a stress-deformed micro-cantilever with large deflection angle. In our approach, we discretized the stress-deformed cantilever into multiple sub-beam segments and calculated the external moment in each node. Unlike most other models, the external moment that attacks the cantilever has not been linearized, which renders our approach valid for cantilevers with large initial tilt and strong bending. By calculation of the stationary solutions of the differential equation describing the bending dynamics, it was possible to calculate the voltage-dependent bending of the cantilever. The model was applied and validated for different examples reported in the literature. A comparison of our calculations with the theoretical and experimental results in other publications proved our approach to be a time-saving method that is superior to existing analytic approaches and much faster than finite-element calculations. It can be concluded that our method is especially suited for the design of micro-electromechanical systems with large tilt angles and long actuation paths of the cantilevers.

show abstract

Section: Numerical Resultsmentioning

confidence: 99%

Section: ( )mentioning

confidence: 99%

See 1 more Smart Citation

Semi-analytic model for the calculation of large-angle bending of electrostatically actuated cantilevers

2020

View full text Add to dashboard Cite

show abstract

“…The movable rings behave, thus, similarly to cantilever‐type MEMS. This principle of electrical actuation through the silicon substrate has already been used in RF‐MEMS switches [47–49] and extended to reconfigurable antennas and filters [50].…”

Section: Applications Of Split Ring Based Linesmentioning

confidence: 99%

Split rings for metamaterial and microwave circuit design: A review of recent developments (Invited paper)

Durán‐Sindreu

Naqui

Bonache

et al. 2012

Int J RF and Microwave Comp Aid Eng

View full text Add to dashboard Cite

This article is a review of recent applications of split rings to the design of planar microwave circuits based on metamaterial concepts. The considered resonators, namely, split-ring resonators (SRRs), complementary SRRs (CSRRs), and their open counterparts (OSRRs and OCSRRs), are reviewed, and the equivalent circuit models of artificial lines based on such resonators, including parasitics, are presented and discussed. The second part of the article is devoted to highlight some recent applications of the considered resonators. This will include the design of dual-band components and wideband bandpass filters based on the combination of OSRRs and OCSRRs, the design of tunable components based on cantilever-type SRRs, and the design of CSRR-based differential (balanced) lines with common-mode suppression.

show abstract

“…Being ferroelectric, piezoelectric, and pyroelectric, lead zirconate titanate (PZT) is one of the most useful and prominent electroceramics and is commonly used as the transduction element of actuators and sensors in microelectromechanical systems (MEMS) and micro‐optics1–6 and in memory devices 7, 8. It is also being explored for new applications such as nanorods,9 domain physics,10 and nanodevices 11, 12.…”

mentioning

confidence: 99%