Stress and strain in titanium nitride thin films

Machunze, R.; Janssen, G. C. A. M.

doi:10.1016/j.tsf.2009.04.020

Cited by 61 publications

(32 citation statements)

References 21 publications

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“…In particular, the calculated residual stress is irrelevant to the employed lattice planes. Meanwhile, the calculated stress-free lattice parameter, a 0 , is stabilized in a small range of 0.4239-0.4248 nm, being comparable to the values reported in the literature [8,9,14,20]. On the other hand, the calculations from the three low-index planes {220}, {200} and {111} produce extraordinarily high residual stresses, namely −11.5, −18.6 and −28.0 GPa, respectively.…”

Section: Residual Stresses Measured Under the {Hkl} Modesupporting

confidence: 83%

“…Therefore, the calculated residual stress value each represents an integrated stress value at certain coating thickness. Considering the fact that most hard coatings exhibit heterogeneous structure depending on the plasma-assisted growth [16][17][18][19][20][21]26,28,29], the GIXRD mode has provided an opportunity to analyze the depth profile of residual stresses, which also helps improve the understanding of the heterogeneous structure.…”

Section: Effect Of X-ray Attenuation On the Results Of Residual Stresmentioning

confidence: 99%

“…Nevertheless, the results suggest that only high-angle diffraction peaks are suitable for residual stress measurement although it is not technically necessary to select a diffraction peak of 2θ > 125 • [4]. [8,9,14,20]. On the other hand, the calculations from the three low-index planes {220}, {200} and {111} produce extraordinarily high residual stresses, namely −11.5, −18.6 and −28.0 GPa, respectively.…”

Section: Residual Stresses Measured Under the {Hkl} Modementioning

confidence: 99%

“…In case of transition metal nitrides, a number of papers reported the anisotropic elastic modulus of titanium nitride coatings [8,[20][21][22][23][24]. For the data scattering in a linear d-sin 2 ψ plot, it has been reported that the method of diffraction peak positioning has significant influence on the precision of the linear d-sin 2 ψ regression and the parabolic method was recommended to give the lowest scattering [25].…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

Luo

Yang

2017

Coatings

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Abstract:Residual stresses of physical vapor deposition (PVD) hard coatings can be measured using X-ray diffraction (XRD) methods under either conventional d-sin 2 ψ mode or glancing incident (GIXRD) mode, in which substantial uncertainties exist depending on the applied diffraction parameters. This paper reports systematic research on the effect of the two analytical modes, as well as the anisotropic elastic modulus, on the measured residual stress values. A magnetron sputtered TiN grown on hardened tool steel was employed as the sample coating, to measure its residual stress using various diffraction peaks from {111} to {422} acquired at a range of incident glancing angles from 2 • to 35 • . The results were interpreted in terms of the effective X-ray penetration depth, which has been found to be determined predominantly by the incident glancing angle. In the d-sin 2 ψ mode, the results present an approximate residual stress over a depth of effective X-ray penetration, and it is recommended to use a diffraction peak of high-index lattice plane from {311} to {422}. The GIXRD mode helps determine a depth profile of residual stress, since the measured residual stress depends strongly on the X-ray penetration. In addition, the anisotropy of elastic modulus shows limited influence on the calculated residual stress value.

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Section: Residual Stresses Measured Under the {Hkl} Modesupporting

confidence: 83%

Section: Effect Of X-ray Attenuation On the Results Of Residual Stresmentioning

confidence: 99%

Section: Residual Stresses Measured Under the {Hkl} Modementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

Luo

Yang

2017

Coatings

View full text Add to dashboard Cite

show abstract

“…In order to describe the deformation of the individual crystallites and hence the lattice spacing due to an in-plane stress state, a grain interaction model is needed [15 -16]. It was reported that only in the rare case of a (001) or (111) textured film of cubic material the film is in plane elastic isotropic and no grain interaction model is needed [6]. In the present paper we assume elastic isotropy in the individual crystallites and hence forgo the use of a grain interaction model.…”

Section: Introductionmentioning

confidence: 99%

High-precision determination of residual stress of polycrystalline coatings using optimised XRD-sin2ψ technique

Luo

Jones

2010

Surface and Coatings Technology

152

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Development and Application of Multi‐Scale Numerical Tool to Modeling Pneumatic Ventricular Assist Devices with Increased Athrombogenicity

Kopernik

2014

Adv Eng Mater

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The multi-scale numerical model of blood chamber of ventricular assist device (VAD) with deposited a biocompatible titanium nitride (TiN) nano-coating is introduced. The model is developed to optimize shape parameters of the blood chamber and to determine fracture parameters of the nano-coating. The development of finite element (FE) macro-model is combined with a digital image correlation data to validate a computed strain state. Contrary, on a micro-scale calibration and validation of a representative volume element (RVE) model of the wall of VAD composed of the TiN coating and substrate-polymer is realized by comparison with results of an experimental in situ SEM's micro-tensile test. The multi-scale model of VAD is enriched with materials research. Thus, tensile tests of VADs' polymers are performed to obtain the properties of designed materials of the VADs. On the other hand, on a micro-scale, the properties of TiN are identified based on a nanoindentation test and an inverse analysis for its interpretation. The profilometric studies and analytical model are presented to calculate a residual stress in the TiN. The final result of the paper is the multi-scale numerical tool to modeling pneumatic VADs with increased biocompatibility produced in Poland. REVIEW Fig. 2. The general conception of the multiÀscale model of VAD's blood chamber: (a) a residual stress modeling and (b) an active load modeling. Reproduced with permission. [15] Fig. 7. The distribution of displacement in Z direction on an external surface of the blood chamber of the VAD under pressure 37.3 kPa and in temperature 37 C: (a) the DIC's result, mm, (b) the FE model's result in the VADFEM code, mm, (c) standard deviation of the DIC's ZÀdirectional displacement (in mm), and (d) standard deviation of the DIC's XÀdirectional principal strains (shown values × 10 − 3 ). Reproduced with permission. [33] 285 REVIEW Fig. 9. Local distributions of (a) an effective strain and (b) a triaxiality factor in the model 4 of prototype of the Polish VAD. Reproduced with permission. [17] The AFM's image of topography of the TiN nano-coating of thickness 50 nm on the selected line of the area 100 nm Â 100 nm; (b) the AFM's image of topography of the TiN nano-coating of thickness 100 nm on the selected line of the area 1 mm Â 1 mm.

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Stress and strain in titanium nitride thin films

Cited by 61 publications

References 21 publications

Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

High-precision determination of residual stress of polycrystalline coatings using optimised XRD-sin2ψ technique

Development and Application of Multi‐Scale Numerical Tool to Modeling Pneumatic Ventricular Assist Devices with Increased Athrombogenicity

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