“…In our study, TiO x (TiO and TiO 0.89 , x ≤ 1) was detected by XRD (Figure B) and TEM (Figure ). Fan et al declared that the electrical resistivities of titanium oxide films increase with increasing oxygen content, and the Ti 2 O, TiO 1+ δ , and γ ‐Ti 3 O 5 films show metallic, superconducting, semiconducting properties, respectively. Thus, TiO x ( x ≤ 1) was more metallic than TiO 2 and Ti 2 O 3 phase with the decreasing of mole fraction of oxygen in the compounds, while all the Ti‐O compounds at the interface of SAC/deposited film had a combination bonding characteristic of metallic, ionic, and covalent.…”