2008
DOI: 10.1116/1.2827512
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Study of a micro chamber quadrupole mass spectrometer

Abstract: The design of a micro chamber quadrupole mass spectrometer ͑MCQMS͒ having a small total volume of only 20 cm 3 , including Faraday cup ion detector and ion source, is described. This MCQMS can resist a vacuum baking temperature of 400-500°C. The quadrupole elements with a hyperbolic surface are made of a ceramic material and coated with a thin metal layer. The quadrupole mass filter has a field radius of 3 mm and a length of 100 mm. Prototypes of this new MCQMS can detect a minimum partial pressure of 10 −8 Pa… Show more

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Cited by 8 publications
(4 citation statements)
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“…Over the last few years, compact mass spectrometers have achieved great progress. For example, there are many different operational principle mass spectrometers at present, including ion traps, quadrupoles, time-of-flight and magnetic sector mass spectro meters [6][7][8][9]. However, the magnetic sector mass spectro meter has been widely studied due to its simple structure, good qualitative capability, insensitivity to pollution, high mass resolution and minimal electromagnetic interference with other instruments and systems [10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…Over the last few years, compact mass spectrometers have achieved great progress. For example, there are many different operational principle mass spectrometers at present, including ion traps, quadrupoles, time-of-flight and magnetic sector mass spectro meters [6][7][8][9]. However, the magnetic sector mass spectro meter has been widely studied due to its simple structure, good qualitative capability, insensitivity to pollution, high mass resolution and minimal electromagnetic interference with other instruments and systems [10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…In particular, the mass analyzer has been the focus of numerous miniaturization efforts. Many researchers have focused on scaling down the Paul ion trap [5], [6], the cylindrical ion trap (CIT) [7]- [10], the quadrupole [11]- [16], the timeof-flight (TOF) [17]- [19], and the magnetic sector instruments [20], [21]. There has also been interesting developments with toroidal ion traps [22], halo ion traps [23], [24], rectilinear ion traps (RITs) [25], [26], and even fully functional systems [27]- [30].…”
mentioning
confidence: 99%
“…With the development of miniature mass analyzers, such as quadrupole mass filters, ion traps, and time-of-flight analyzers, portability of mass spectrometer systems used for MIMS has also been achieved, , which is important for field applications such as OiW monitoring. This is because smaller analyzers can operate at higher pressures, requiring less robust and less expensive vacuum systems that consume less power and allow battery operation.…”
mentioning
confidence: 99%