We report the design, fabrication, and characterization of a new class of chip-scale quadrupole mass filter (QMF). The devices are completely batch fabricated using a wafer-scale process that integrates the quadrupole electrodes, ion optics, and housing into a single monolithic block. This process eliminates the electrode-to-housing misalignments inherent in other QMFs and enables the implementation of complex device architectures. To achieve the reported integration, 1 mm × 1 mm square electrodes of heavily doped silicon were utilized, resulting in quadrupoles with an effective aperture radius of 0.707 mm and a length of 30 mm. Mass filtering was demonstrated with this unconventional device showing a mass range of 650 amu and a resolution of ∼30 at a drive frequency of 1.8 MHz. When operated in the second stability region at 2.0 MHz and a mass range of 50 amu, a peak width of 0.3 amu was achieved at mass 28, showing a resolution of ∼90. This paper introduces operation in the second stability region as a reliable method for turning QMFs with less than ideal electrode geometries into high-performance devices. [2009-0325] Index Terms-Chip-scale quadrupole, mass filter, second stability region, square electrodes. I. INTRODUCTION M ASS spectrometers are powerful analytical instruments that have a wide range of applications spanning national security, environmental monitoring, space exploration, industrial processing, healthcare, and many others. In recent years, there has been a growing desire to take these useful tools into space and into the field to perform analyses in harsh environments. To achieve this migration, mass spectrometers need to be small, light, mechanically and thermally robust, and low powered. Miniaturization addresses most of these requirements by achieving portability from the reduction of size and weight. Additionally, the smaller devices will enable operation at higher pressures, relaxing the need for large, heavy, and power-hungry vacuum pumps [1]-[4]. The four major components of a mass spectrometer are the ionizer, the mass analyzer, the detector, and the vacuum pump.