2017
DOI: 10.1016/j.vacuum.2017.01.029
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Study of cathode current effect on the properties of CrAlSiN coatings prepared by LARC

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Cited by 19 publications
(10 citation statements)
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“…Apart from that, increasing the DC current applied to the AlSi cathode leads to the emission of higher quantities of micro-and macroparticles from the cathode [30,31], which is due to the lower melting point of the cathode material [30]. This also negatively affects the surface roughness, as it was shown in our previous work conducted on AlCrSiN coatings [32].…”
Section: Chemical Composition Of Al-cr-si-n Hard Coatingsmentioning
confidence: 74%
“…Apart from that, increasing the DC current applied to the AlSi cathode leads to the emission of higher quantities of micro-and macroparticles from the cathode [30,31], which is due to the lower melting point of the cathode material [30]. This also negatively affects the surface roughness, as it was shown in our previous work conducted on AlCrSiN coatings [32].…”
Section: Chemical Composition Of Al-cr-si-n Hard Coatingsmentioning
confidence: 74%
“…Currently, PVD hard coatings such as CrN, TiN, CrAlN, and TiAlN are used to improve the properties of tool steels and extend the lifetime of mechanical components and tools [7,8,9,10,11]. The introduction of silicon into CrAlN could decrease the grain size, change the coating structure, composition, and its mechanical properties [12,13,14]. In this CrAlSiN, silicon is apt to segregate into amorphous SiN x along the grain boundaries.…”
Section: Introductionmentioning
confidence: 99%
“…Nanocomposite hard coatings with increased AlSi deposited by PVD using the Lateral Rotating Cathode (LARC) system allows for obtaining an increase of Ra surface roughness if compared to the substrate. This is due to the lower melting point of the evaporated material during cathodic arc deposition [ 14 ]. Increasing cathode current leads to the emission of a higher quantity of particles with a bigger volume and size.…”
Section: Resultsmentioning
confidence: 99%
“…Increasing cathode current leads to the emission of a higher quantity of particles with a bigger volume and size. As a final result, it is expected that the amount of cathode material would rise with a lower melting point, which would then lead to an increase in the surface roughness [ 14 ]. Even though a quick increasing in Ra has been seen, the cathodic arc evaporation process using LARC technology is able to produce very smooth surface roughness when compared to conventional cathodic arc evaporation process [ 15 ].…”
Section: Resultsmentioning
confidence: 99%