International Technical Digest on Electron Devices
DOI: 10.1109/iedm.1990.237174
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Submicron spaced lens array process technology for a high photosensitivity CCD image sensor

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Cited by 11 publications
(4 citation statements)
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“…A double micro lens structure is often used as a method for efficient light collection into a narrow optical aperture [ 13 , 14 ]. An inner lens is placed above the Cu-wiring layers as shown in Figure 3 .…”
Section: Reduction Of Plsmentioning
confidence: 99%
“…A double micro lens structure is often used as a method for efficient light collection into a narrow optical aperture [ 13 , 14 ]. An inner lens is placed above the Cu-wiring layers as shown in Figure 3 .…”
Section: Reduction Of Plsmentioning
confidence: 99%
“…A UV-replication process was used for replicating the DOE pattern. Figure 6 shows the process flow of the UV replication [11,12]. Figure 7 shows the UV-replication system.…”
Section: Uv-replication Processmentioning
confidence: 99%
“…Arrays of microlenses have been fabricated for use in focal plane array CCD cameras, wavefront sensors, and fiber collimators [11], [12]. Photolithography is used to create refractive microlenses in both photosensitive polymers and substrates.…”
Section: A Review Of Microlens Fabrication Techniquesmentioning
confidence: 99%