2006
DOI: 10.1016/j.apsusc.2005.07.034
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Surface morphology of metal films deposited on mica at various temperatures observed by atomic force microscopy

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Cited by 44 publications
(30 citation statements)
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“…28,29,34,35 However, the smaller value of W/Rms = 1.31 ± 0.58 than 2.36 shows that the surface heights distribute closely at 0 nm and the shape is not Gaussian.…”
Section: Preparation and Characterization Of Atomically-smooth Al Filmsmentioning
confidence: 98%
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“…28,29,34,35 However, the smaller value of W/Rms = 1.31 ± 0.58 than 2.36 shows that the surface heights distribute closely at 0 nm and the shape is not Gaussian.…”
Section: Preparation and Characterization Of Atomically-smooth Al Filmsmentioning
confidence: 98%
“…Thus, W is represented by 2.36Rms and most (>95%) areas of the peak are in the 2W region between ±W. 31,[33][34][35] The average values and standard deviations of W, Rms, and W/Rms of the images are given in Table 1, where the numbers in parentheses are those of the images used for the calculations. 35 The surface of the oxidized Al film prepared at room temperature is rough (Rms = 1.80 ± 0.94 nm and W = 1.93 ± 0.39 nm).…”
Section: Preparation and Characterization Of Atomically-smooth Al Filmsmentioning
confidence: 99%
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“…The annealing process during the deposition did not form a single crystal but increased the size of Au clusters and surface roughness. This is because Au on mica substrate has a large diffusion coefficient [25] and form (111) surface only at high-temperature (>473 o C) regardless to deposition rate [26]. However, this fact is in contrast to a post-process annealing of Au thin films on mica substrate forming a large single crystal typically at 400~500 o C [14][15][16].…”
Section: Annealing Effect To Au Deposition On Mica Substratesmentioning
confidence: 56%