Surface tension powered self-assembly of 3D MOEMS devices using DRIE of bonded silicon-on-insulator wafers

Abstract

Time-sequential surface tension self-assembly allows the demonstration of 90˚ rotated structures. The limiter mechanism of Figure 2b is first used to construct a stop in mid air above the substrate, which then prevents further rotation of an additional component when it has rotated through 90˚. These structures may act as fixed mirrors; however, they may also carry other optical components. For example, Figure 5 shows arrays of 80 µm diameter refractive microlenses, which have been formed by reflow molding of photoresist 8 without introducing any additional process complexity.