Surface Transportation of Chemical Species in Spray-Cleaning and Gate Oxide Integrity

Sheng, Lieyi; Backer, E. De; Verpoort, Philippe; Greve, J. De

doi:10.1109/relphy.2006.251306

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Vertical Mass Transportation In Bath1

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Cited by 3 publications

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“…The surface transportation behavior along the horizontal direction on wafer was initially studied for promptly resolving a subtle gate oxide integrity (GOI) issue due to spin clean (2). Therefore, the vertical mass transportation is particularly to start with in this paper.…”

Section: Vertical Mass Transportation In Bathmentioning

confidence: 99%

Spatial Revelations of Chemical and Electrochemical Kinetics into Defect Generations during Semiconductor Processing

Sheng¹,

Wei²

2020

ECS Trans.

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The unique fundamentals of kinetic phenomena during semiconductor processing have been extensively reviewed for the first time. A comprehensive three-dimensional (3D) view provides several insights into chemical transportations along wafer surface and electrical cross-sections in device stacks. Multiple case studies are detailed in order to illustrate the effectiveness of connecting these unique dynamics with critical defects generated. These spatial revelations have made significant contributions to our solid technology development as well as quality manufacturing.

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Section: Vertical Mass Transportation In Bathmentioning

confidence: 99%