Tactile Sensing Chips With POSFET Array and Integrated Interface Electronics

Abstract

This paper presents the advanced version of novel piezoelectric oxide semiconductor field effect transistor (POSFET) devices-based tactile sensing chip. The new version of the tactile sensing chip presented here comprises of a 4 × 4 array of POSFET touch sensing devices and integrated interface electronics (i.e., multiplexers, high compliance current sinks, and voltage output buffers). The chip also includes four temperature diodes for the measurement of contact temperature. Various components on the chip have been characterized systematically and the overall operation of the tactile sensing system has been evaluated. With new design, the POSFET devices have improved performance [i.e., linear response in the dynamic contact forces range of 0.01-3 N and sensitivity (without amplification) of 102.4 mV/N], which is more than twice the performance of their previous implementations. The integrated interface electronics result in reduced interconnections which otherwise would be needed to connect the POSFET array with off-chip interface electronic circuitry. This paper paves the way for CMOS implementation of full on-chip tactile sensing systems based on POSFETs.

Towards bendable piezoelectric oxide semiconductor field effect transistor based touch sensor

“…4 shows the cross section of device. Planar POSFET has been reported by Dahiya et al in past, but due to lack of flexibility, the usage of these tactile sensors are limited to flat areas [3]. In present time there are many post-processing ways and techniques in use which produce thin silicon membrane of thickness ranging from 10 µm -100 µm.…”

“…Contrary to these, MEMS based approach gives an attractive way to miniaturise and integrate transducer directly in the existing well-developed and fast CMOS technology. One of the promising candidates, Piezoelectric Oxide Semiconductor Field Effect Transistor (POSFET), uses piezoelectric thin film as a transducer on its gate area [3] [4]. However, MEMS based tactile sensing devices cannot withstand large pressure/force due to their inherent fragile nature and therefore lacks flexibility and conformability needed for better integration with curved body parts.…”

New materials and advances in making electronic skin for interactive robots

“…However, the use of these materials is limited due to their rigid and brittle nature. Dahiya et al [105] reported development of piezoelectric oxide semiconductor field effect transistors (POSFET) for robotic tactile applications. The device demonstrated a sensitivity of 102.4 mV/N.…”

At-Home Computer-Aided Myoelectric Training System for Wrist Prosthesis

“…This refers especially on the applied grip force, so as an object to be neither firmly, nor loosely grasped. Solutions that have been explored towards this direction focus on tactile sensing chips that mimic the properties of the human skin [23][24][25][26].…”