SUMMARYAs the LSI process technology advances and the gate size becomes smaller, the signal delay on interconnect becomes a significant factor in the signal path delay. Also, as the size of interconnect structure becomes smaller, the interconnect process variations have become one of the dominant factors which influence the signal delay and thus clock skew. Therefore, controlling the influence of interconnect process variations on clock skew is a crucial issue in the advanced process technologies. In this paper, we propose a method for minimizing clock skew fluctuations caused by interconnect process variations. The proposed method identifies the suitable balance of clock buffer size and wire length in order to minimize the clock skew fluctuations caused by the interconnect process variations. Experimental results on test circuits of 28 nm process technology show that the proposed method reduces the clock skew fluctuations by 30-92% compared to the conventional method.