“…In these devices, the conduction mechanism depends on various parameters such as surface preparation process, formation of barrier height (BH) and interface states (N ss ) at M/S interface, doping carrier concentration in semiconductor (N D or N A ), series resistance (R s ), substrate temperature and applied bias voltage [9][10][11][12][13][14]. Among them, R s is effective only in the downward curvature region (accumulation region) of the C-V characteristics, but the N ss is effective in weak inversion and depletion regions [15][16][17][18][19][20].…”