The characterization of single structure diamond heater and temperature sensor

Yang, G. S.; Aslam, D.M.; White, Mary Anne; McGrath, John

doi:10.1016/s0925-9635(96)00738-8

Cited by 14 publications

(4 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…CVD diamond films are polycrystalline and hence contain grain boundaries, twins, stacking faults, and other defects, which all reduce the lifetime and mobilities of carriers. Traditionally, electrical conductivity of diamond films is obtained through doping with boron achieved by adding a few per cent of B 2 H 6 to the CVD process gas mixture during growth, which results in p-type behaviour [21,22]. At low and medium concentration, the activation energy for doping is low and is suitable for electronics applications, particularly in high temperature.…”

Section: Preparation and Characterization Of Diamond And Dlc Filmsmentioning

confidence: 99%

“…A wide band gap and its good thermal conductivity and piezoelectric properties make diamond and DLC some of the best materials for sensing applications in harsh environments, involving exposure to high temperature and levels of radiation. They have been utilized for various sensors such as those detecting temperature [90,91], gas species or pressure, and UV [92,93] at temperatures up to 700 • C. Furthermore, as a result of their piezoresistivity, diamond films can be directly used as active sensors themselves [92]. This effect is useful in developing strain gauges, accelerometers and some biomedical sensors.…”

Section: Piezoresistive and Other Sensorsmentioning

confidence: 99%

See 1 more Smart Citation

Diamond and diamond-like carbon MEMS

Luo¹,

Fu²,

Le³

et al. 2007

J. Micromech. Microeng.

192

View full text Add to dashboard Cite

Diamond and diamond-like carbon (DLC) thin films possess a number of unique and attractive material properties that are unattainable from Si and other materials. These include high values of Young's modulus, hardness, tensile strength and high thermal conductivity, low thermal expansion coefficient combined with low coefficients of friction and good wear resistance. As a consequence, they are finding increasing applications in micro-electro-mechanical systems (MEMS). This paper reviews these distinctive material properties from an engineering design point of view and highlights the applications of diamond and DLC materials in various MEMS devices. Applications of diamond and DLC films in MEMS are in two categories: surface coatings and structural materials. Thin diamond and DLC layers have been used as coatings mainly to improve the wear and friction of micro-components and to reduce stiction between microstructures and their substrates. The high values of the elastic modulus of diamond and DLC have been exploited in the design of high frequency resonators and comb-drives for communication and sensing applications. Chemically modified surfaces and structures of diamond and DLC films have both been utilized as sensor materials for sensing traces of gases, to detect bio-molecules for biological research and disease diagnosis.

show abstract

Section: Preparation and Characterization Of Diamond And Dlc Filmsmentioning

confidence: 99%

Section: Piezoresistive and Other Sensorsmentioning

confidence: 99%

Diamond and diamond-like carbon MEMS

Luo¹,

Fu²,

Le³

et al. 2007

J. Micromech. Microeng.

192

View full text Add to dashboard Cite

show abstract

“…Diamond has been intensively studied in the last few years for various sensor and actuator applications such as pressure sensors [1], spot heaters [2] or electrochemical electrodes [3]. Its outstanding properties predestine the material for applications in microelectromechanical systems (MEMS) [4,5].…”

Section: Introductionmentioning

confidence: 99%

Design of high-speed diamond microswitch

Schmid¹,

Adamschik²,

Kohn³

2003

Semicond. Sci. Technol.

View full text Add to dashboard Cite

In this work, microswitches based on polycrystalline diamond films are investigated. Device properties such as switch-on and switch-off times are calculated and compared to measurement results obtained from fabricated structures. Pre-stress effects, common in free-standing diamond structures, have been included in the model. The influence of various geometric parameters on the transient behaviour of the switches is calculated. Diamond is shown to improve the transient behaviour of the devices in comparison with other materials such as silicon.

show abstract

“…The resistivity of lightly doped p-type diamond varies with temperature and can be used as a thermistor for measuring the diamond temperature. Boron-doped p-type microcrystalline CVD diamond deposited on an intrinsic CVD diamond film has been used to demonstrate biocompatible heaters 26 . Application of boron-doped microcrystalline CVD diamond heaters for catheter ablation in the heart was successfully demonstrated in cardiac muscle tissue of pigs 27 .…”

mentioning

confidence: 99%

Nitrogen-incorporated ultrananocrystalline diamond and multi-layer-graphene-like hybrid carbon films

Tzeng

Yeh

Fang

et al. 2014

Sci Rep

View full text Add to dashboard Cite

Nitrogen-incorporated ultrananocrystalline diamond (N-UNCD) and multi-layer-graphene-like hybrid carbon films have been synthesized by microwave plasma enhanced chemical vapor deposition (MPECVD) on oxidized silicon which is pre-seeded with diamond nanoparticles. MPECVD of N-UNCD on nanodiamond seeds produces a base layer, from which carbon structures nucleate and grow perpendicularly to form standing carbon platelets. High-resolution transmission electron microscopy and Raman scattering measurements reveal that these carbon platelets are comprised of ultrananocrystalline diamond embedded in multilayer-graphene-like carbon structures. The hybrid carbon films are of low electrical resistivity. UNCD grains in the N-UNCD base layer and the hybrid carbon platelets serve as high-density diamond nuclei for the deposition of an electrically insulating UNCD film on it. Biocompatible carbon-based heaters made of low-resistivity hybrid carbon heaters encapsulated by insulating UNCD for possible electrosurgical applications have been demonstrated.

show abstract

The characterization of single structure diamond heater and temperature sensor

Cited by 14 publications

References 7 publications

Diamond and diamond-like carbon MEMS

Diamond and diamond-like carbon MEMS

Design of high-speed diamond microswitch

Nitrogen-incorporated ultrananocrystalline diamond and multi-layer-graphene-like hybrid carbon films

Contact Info

Product

Resources

About