Proceedings of IEEE International Electron Devices Meeting
DOI: 10.1109/iedm.1993.347222
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The trench MOS barrier Schottky (TMBS) rectifier

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Cited by 31 publications
(16 citation statements)
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“…L'idée commune à ces concepts est la modification structurelle de la zone N -. La Superjonction [20], le MOS à « tranchées profondes à déplétion MOS latérale » − connu sous le nom de transistor OBVDMOS [21] − et la FLI-diode [22] seront présentés dans les chapitres suivants.…”
Section: I5 Présentation Des Nouvelles Structuresunclassified
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“…L'idée commune à ces concepts est la modification structurelle de la zone N -. La Superjonction [20], le MOS à « tranchées profondes à déplétion MOS latérale » − connu sous le nom de transistor OBVDMOS [21] − et la FLI-diode [22] seront présentés dans les chapitres suivants.…”
Section: I5 Présentation Des Nouvelles Structuresunclassified
“…Les diodes Schottky, utilisées pour la faible tension, ont connu une nette amélioration ces dernières années grâce à l'apparition du concept de « tranchée profondes à déplétion MOS latérale » [21] : ce sont les « Trench MOS Barrier Schottky » (TMBS).…”
Section: I53 Les Composants à « Tranchées Profondes à Déplétion Mounclassified
“…By contrast, the pin junction rectifier has low forward drop and high current capability due to conductivity modulation, but has slow reverse recovery characteristics due to minority carrier storage. To combine the best features of these two rectifiers, hybrid rectifier structures, such as the Junction Barrier Schottky (JBS), Merged Pin/Schottky (MPS) and MOS Barrier Schottky (MBS) rectifiers have been proposed and have been demonstrated in silicon (Wilamowski 1983;Baliga 1984;Baliga & Chang 1987;Mehrotra & Baliga 1995). The trench version of the MBS rectifier is schematically shown in Fig Whether a unipolar or a bipolar rectifier is preferred depends on many device parameters, such as reverse blocking voltage, forward current density, maximum allowable reverse current density, operating temperature and switching frequency.…”
Section: Power Rectifiersmentioning
confidence: 99%
“…In order to achieve good reverse blocking characteristics while maintaining a Schottky forward conduction and fast reverse recovery characteristics, several modern rectifiers, such as Junction Barrier Schottky (JBS) (Wilamowski 1983;Baliga 1984), Dual Metal Trench (DMT) Schottky and Trench MOS Barrier Schottky (TMBS) (Mehrotra & Baliga 1995) rectifiers, have been explored. The physical principle used to reduce the leakage current is the same -to completely deplete the Schottky mesa regions under the Schottky junction so as to suppress the electric field from rising at the Schottky junction when the bias at the substrate cathode is increased.…”
Section: Hybrid Rectifiersmentioning
confidence: 99%
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