Theory of the formation of the energy spectra of reflected charged particles

Abstract

The theory of the formation of the energy spectra of electrons and light ions reflected form a solid surface is constructed. It is shown that methods based on the numerical solution of boundary value problems for the transport equation are the most effective. The boundary value problem is solved based on the invariant embedding method. Equations for the reflection coefficients describing the flux of atomic parti cles reflected in the direction n and having experienced k events of elastic scattering are obtained. The obtained results are compared with experimental data, the results of simulation using the Monte Carlo method, and the calculations of other authors.