Thermal buckling actuator for micro relays

Seki, T.; Sakata, Minoru; Nakajima, Takashi; Matsumoto, Mikio

doi:10.1109/sensor.1997.635409

Cited by 15 publications

(10 citation statements)

References 3 publications

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“…As an example, Seki et al proposed a thin Si clampedclamped beam which is deformed by buckling due to thermal SiO 2 built-in stress and thermal stress (Seki et al 1997). The actuator was fabricated by a micromachining technology using sealed cavities.…”

Section: Temperature Extensionmentioning

confidence: 99%

“…This can be achieved if the mechanical energy, stored in the pre-stressed bending plate, is released abruptly at the transition point. For this reason, usually bi-stable mechanisms are implemented (Seki et al 1997;Qui et al 2003).…”

Section: Transducermentioning

confidence: 99%

“…Beside electrostatically controlled relays (Drake et al 1995) other control principles have been proposed, e.g., thermal bimorph solutions (Seki et al 1997;Qui et al 2003). Hei et al proposed a MEMS-based relay for ultralow-power digital logic applications.…”

Section: Introductionmentioning

confidence: 99%

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Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems

2012

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Energy-autarkic sensor systems use energy from their environment for operation and data transfer. This needs both an efficient energy harvesting strategy and an appropriate energy storage management but also ultralow-power technologies for sensors, signal processing, and wireless signal transfer. Binary Zero-Power Sensors are threshold switches which take the switching energy directly from the quantity to be measured. For this purpose stimuli-responsive polymers-in particular hydrogels-are used which swell upon the influence of particular quantities like humidity, temperature or pH value. The swelling causes the deflection of a flexure element closing or opening the contacts of a switch. In this manner they deliver the switching states ''ON'' and ''OFF'' without any additional electrical energy.

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Section: Temperature Extensionmentioning

confidence: 99%

Section: Transducermentioning

confidence: 99%

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Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems

2012

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“…The existing reports also show the following advantages: simple fabrication process and easy integration with other microelectromechanical systems (MEMS) components for some electrothermal actuators [5], [6]. In applications, the electrothermal actuators have been applied to drive various MEMS devices [7]- [9].…”

Section: Introductionmentioning

confidence: 99%

Design and Characterization of Single-Layer Step-Bridge Structure for Out-of-Plane Thermal Actuator

Chen

Yeh

et al. 2008

J. Microelectromech. Syst.

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“…Examples of such microfabricated switching devices, employing electrostatic [3,4], electromagnetic [5] and thermal [6] actuation have been reported. The major drawbacks of thermal actuation are the low switching time and the high static power consumption.…”

Section: Introductionmentioning

confidence: 99%

Innovative design and modelling of a micromechanical relay with electrostatic actuation

Sattler

Voigt

Pradel

et al. 2001

J. Micromech. Microeng.

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The behaviour of a surface-micromachined electrostatic microrelay and the influence of the design parameters on the pull-in voltage and the contact force are analysed by means of finite-element method simulations. Three models have been used and compared-a fully three-dimensional coupled electromechanical numerical simulation using CoSolveEM, a two-dimensional coupled simulation, and a simplified semi-analytical model based on the parallel-plate capacitor approximation-and these have shown good conformity. As a new idea, an extension paddle attached to the contact bar is proposed and the positive influence on the pull-in voltage and the contact force is demonstrated.

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Thermal buckling actuator for micro relays

Cited by 15 publications

References 3 publications

Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems

Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems

Design and Characterization of Single-Layer Step-Bridge Structure for Out-of-Plane Thermal Actuator

Innovative design and modelling of a micromechanical relay with electrostatic actuation

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