Thermo-magnetic metal flexure actuators

Guckel, H.; Klein, J.; Christenson, Todd R.; Skrobis, K.J.; Laudon, M.; Lovell, Edward G.

doi:10.1109/solsen.1992.228273

Cited by 172 publications

(115 citation statements)

References 2 publications

Supporting

Mentioning

114

Contrasting

Order By: Relevance

“…The electrothermal shape bimorph actuator of Guckel [6] is one possibility. The device consists of a U-shaped structure suspended on two points, which may be heated by passing a current between the anchors.…”

Section: Index Terms-microelectromechanical Systems (Mems) Microoptomentioning

confidence: 99%

Multistate Latching MEMS Variable Optical Attenuator

Syms

Zou

Stagg

et al. 2004

IEEE Photon. Technol. Lett.

View full text Add to dashboard Cite

Abstract-A multistate latching variable optical attenuator (VOA) is demonstrated using microelectromechanical systems (MEMS) technology. The mechanism is used to fix the position of a shutter inserted into the optical path between two single-mode fibers. The mechanism and fiber mounts are fabricated in 85 m thick silicon using bonded silicon-on-insulator material, by deep reactive ion etching. The device can be continuously adjusted or latched into a discrete set of attenuation states using a rack-and-tooth mechanism driven by electrothermal shape bimorph actuators. Electromechanical and optical characterization is performed to demonstrate a latching VOA function, with a maximum attenuation of 30 dB. Index Terms-Microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), variable optical attenuator (VOA).

show abstract

Section: Index Terms-microelectromechanical Systems (Mems) Microoptomentioning

confidence: 99%

Multistate Latching MEMS Variable Optical Attenuator

Syms

Zou

Stagg

et al. 2004

IEEE Photon. Technol. Lett.

View full text Add to dashboard Cite

show abstract

“…6) Thermal Actuator [65], [66]: Thermal expansion is a strong force, but a single-material actuator based solely on the thermal expansion of a beam usually has very small deflection. By combining a "hot" arm and a "cold" arm in a U-shaped geometry, the deflection is greatly amplified.…”

Section: Microactuatorsmentioning

confidence: 99%

Micromachining for optical and optoelectronic systems

1997

Proc. IEEE

246

101

View full text Add to dashboard Cite

“…The horizontal U shape microactuator has a narrow hot cold arm. It operates based on the differential thermal expansion of these arms, when a voltage is applied between its contact pads [16]. Two-arm actuators design consists of a thin arm, wide arm and flexure arm connected together at one end and constrained elastically at the anchors, which in turn are rigidly attached to the substrate.…”

Section: Introductionmentioning

confidence: 99%

Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

Kumar¹,

Sharma²

2014

IJMMM

View full text Add to dashboard Cite

Abstract-This paper presents design and fabrication of a MEMS thermal actuator using SOI technology. The thermal actuators are used in, micro grippers, micro mirror and switching applications by applying voltage on different contact pads, causing beams with pseudo bimorph characteristics heated, thereby the microactuator can produce lateral motion in plane or out of plane. The narrow or hot arm heats up and expands more than the wide or cold arm deflecting the device toward the cold arm. Thermal actuators are more power efficient than electrostatic actuators. The present work carries the design, fabrication and characterization of the thermal actuator wherein numerical simulation are carried out in COMSOL multiphysics tool and fabrication was done at MUMPS facility MEMSCAP. The simulated results on displacement versus voltage are verified experimentally.

show abstract

Thermo-magnetic metal flexure actuators

Cited by 172 publications

References 2 publications

Multistate Latching MEMS Variable Optical Attenuator

Multistate Latching MEMS Variable Optical Attenuator

Micromachining for optical and optoelectronic systems

Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

Contact Info

Product

Resources

About