1996
DOI: 10.1107/s0021889896003809
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Thin-Film Study using Low-Incidence and Bragg–Brentano Texture Goniometry. Application to Mono- and Bilayers of Al and Al/Fe

Abstract: Texture goniometry of thin layers needs intensity corrections in Bragg–Brentano or low‐incidence geometries. These intensity corrections are described for the case where the diffracting volume consists of a single layer or bilayers. As an application, the respective orientations of aluminium thin films deposited on steel and bilayers of aluminium/iron deposited on silicon wafers are studied. The orientation relationship between iron and silicon is (111)Si||(110)Fe and between aluminium and iron is (111)Al||(11… Show more

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Cited by 5 publications
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“…23,24 On the other hand, when deposition occurs at oblique incidence, biaxial texture develops exhibiting both outof-plane and in-plane alignment. 22,25−33 Although analysis of preferred orientation, or texture, in other sputtered materials has been carried out, 22,23,34,35 there is a large gap in this knowledge with respect to TiO 2 , with only a few studies that have discussed preferred orientation of titania films, but in a qualitative manner without going into the detailed characterization of texture. 10,12,36−38 Furthermore, there are no reports connecting preferred orientation of sputtered TiO 2 films to reactivity.…”
Section: ■ Introductionmentioning
confidence: 99%
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“…23,24 On the other hand, when deposition occurs at oblique incidence, biaxial texture develops exhibiting both outof-plane and in-plane alignment. 22,25−33 Although analysis of preferred orientation, or texture, in other sputtered materials has been carried out, 22,23,34,35 there is a large gap in this knowledge with respect to TiO 2 , with only a few studies that have discussed preferred orientation of titania films, but in a qualitative manner without going into the detailed characterization of texture. 10,12,36−38 Furthermore, there are no reports connecting preferred orientation of sputtered TiO 2 films to reactivity.…”
Section: ■ Introductionmentioning
confidence: 99%
“…Pole figures were acquired in Schultz geometry for (101) and (004) reflections. Pole figures were corrected for scattering volume differences according to the method described by Tizliouine et al 35 For (101) pole figures data were collected for α in steps of 10 deg (10 <α < 90), and the sample was rotated around ϕ, in steps of 5 deg (−180 <ϕ < 180) for each step in α. For (004) pole figures data were collected for α in steps of 5 deg (0 <α < 90) and for ϕ in steps of 1 deg.…”
Section: ■ Introductionmentioning
confidence: 99%
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