Transfer Printed Nanomembranes for Heterogeneously Integrated Membrane Photonics

Abstract

Heterogeneous crystalline semiconductor nanomembrane (NM) integration is investigated for single-layer and double-layer Silicon (Si) NM photonics, III-V/Si NM lasers, and graphene/Si NM total absorption devices. Both homogeneous and heterogeneous integration are realized by the versatile transfer printing technique. The performance of these integrated membrane devices shows, not only intact optical and electrical characteristics as their bulk counterparts, but also the unique light and matter interactions, such as Fano resonance, slow light, and critical coupling in photonic crystal cavities. Such a heterogeneous integration approach offers tremendous practical application potentials on unconventional, Si CMOS compatible, and high performance optoelectronic systems.

Assembly and Self‐Assembly of Nanomembrane Materials—From 2D to 3D

“…Experimental results demonstrate that such a 3D laser device has a much tighter field distribution, with reduced energy penetration depth and device dimensions . Moreover, the fabrication technique of stacking nanomembranes enables the creation of many high‐performance photonic devices on different substrates, as well as a planar structure that allows much simpler integration schemes …”

“…However, if the nanomembrane needs to be transferred accurately to certain position, an improved dry transfer process should be engaged and Roger and co‐workers thus developed a “transfer printing” process . The process is accomplished by using a microstructured elastomeric stamp (polydimethylsiloxane, PDMS, in most cases) to selectively “pick‐up” patterned nanomembranes or even devices from a source substrate (panel (ii) of Figure b) and then “place”/“print” structures onto a target substrate . It is worth noting that the details of transfer printing may slightly vary in different experimental works.…”

“…The assembly of nanomembranes with unique physical properties also have application potentials in photonics and optoelectronics . The transfer printing process provides the possibility of assembling nanomembrane into novel 3D stack structures for optical applications . Panel (i) of Figure b shows a diagram of a vertical‐cavity surface‐emitting laser (VCSEL) device with stacked nanomembranes .…”

Electronic Transport in Hydrogen-Terminated Si(001) Nanomembranes

“…9 Through thinness, extreme flexibility, and a high surface/interface-tovolume ratio, NMs exhibit remarkable mechanical, optical, and electrical properties that are quite different from those of a corresponding bulk crystal. Consequently, NMs have spawned applications in diverse fields, such as flexible and stretchable electronics, 10,11,12,13 photonic structures, 14,15,16 energy storage devices, 17,18 and solar cells. 19 NM structures can be completely freestanding, tethered to a substrate, or bonded to different host materials.…”

Semiconductor Nanomembrane-Based Light-Emitting and Photodetecting Devices

“…Pioneered by Rogers et al, a polydimethylsiloxane (PDMS) stamp-assisted transfer printing process has been used to transfer a variety of crystalline semiconductor NMs on different foreign host substrates. This heterogeneous materials stack could be integrated with Si and flexible substrate applications [25][26][27][28][29][30][31][32][33].…”