Two approaches for realizing traceability in nanoscale dimensional metrology

Dai, Gaoliang; Koenders, Ludger; Fluegge, Jens; Bosse, Harald

doi:10.1117/1.oe.55.9.091407

Cited by 26 publications

(19 citation statements)

References 25 publications

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“…In fact, vendors with secondary standards for the industry have introduced a similar approach to calibrate one of their products [45]. PTB has independently implemented conceptually relevant methodologies [46][47][48]. The PTB implementation of CD-AFM is based on a method known as Vector Approach Probing.…”

Section: Transmission Electron Microscopementioning

confidence: 99%

Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

et al. 2021

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With the progress in nanotechnology, the importance of nanodimensional standards is increasing. Realizing nanodimensional standards requires multiple types of high-precision microscopy techniques. The National Metrology Institute of Japan (NMIJ), one of the research domains in the National Institute of Advanced Industrial Science and Technology (AIST), is developing nanodimensional standards using atomic force, transmission electron, and scanning electron microscopes. The current status of nanodimensional standards in NMIJ is introduced herein.

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Section: Transmission Electron Microscopementioning

confidence: 99%

Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

et al. 2021

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“…To accurately evaluate the critical dimension parameters based on the lattice constant, the most challenging issue is how to accurately assign the feature edges in the high-resolution STEM images. [11] Now it has been common sense that the feature edge detection will contribute the biggest uncertainty source for the CD structure evaluation. However, previous research agreed that the contribution caused by line edge definition can be controlled under 0.3 nm.…”

Section: Evaluation Of Critical Dimension Based On the Lattice Constantmentioning

confidence: 99%

“…[10] And researchers have proved that it holds the same accuracy to be used as a new approach to realize traceability in nanoscale dimensional metrology. [4,[11][12][13] The typical crystal CD material is based on silicon. Figure 1(a) shows a design of crystal CD standard with direct Si lattice calibration, the CD value can be determined by counting the pixels in transmission electron microscopy (TEM) images together with the distance between neighbor Si (111) planes acting as an internal ruler.…”

Section: Introductionmentioning

confidence: 99%

Amorphous Si critical dimension structures with direct Si lattice calibration

Wu¹,

Cai²,

Wang³

et al. 2019

Chinese Phys. B

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Developing highly accurate critical dimension standards is a significant task for nanoscale metrology. In this paper, we put forward an alternative approach to fabricate amorphous Si critical dimension structures with direct Si lattice calibration in the same frame scanning transmission electron microscopy image. Based on the traceable measurement analysis, the optimized method can provide the same calibration accuracy and increase the fabrication throughput and lower the cost simultaneously, which benefits the application needs in atomic force microscopy (AFM) tip geometry characterization, benchmarking measurement tools, and conducting comparison measurements between different approaches.

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“…Calibration of the instruments is the crucial operation to ensure that the instrument performs its task accurately and to provide comparability between instruments and results [ 7 , 8 ]. It also provides an adjustment to the measuring devices and ensures traceability of the measurements [ 9 , 10 , 11 ]. Depending on the instrument’s complexity, the calibration may consist of one or more tasks to ensure the accuracy of the measurements.…”

Section: Introductionmentioning

confidence: 99%

Feasibility Study of a Piezo Actuator as a Potential Standard in Calibration for Roundness Instruments

Trych-Wildner

Wildner

Sosinowski

2022

Sensors

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The paper presents experimental data that show the possible application of a piezo actuator in the role of calibration standard that can serve as an alternative route to currently available methods like gauge blocks or flick standards. First, the experimental setups for interferometric and roundness instruments measurements were described. Next, the experiments using an interferometer for calibration of the piezo actuator were shown. Finally, the application of a piezo actuator to calibrate the roundness instrument, to state the correction factor for the roundness probe, and to relate it to the unit of metre, assuring the traceability of future measurements was performed. Detailed procedures of simulating grooves and then processing the data were described and the calibration curve was obtained using regression analysis. The estimation of uncertainty provided by different factors during the measurements was given to fulfil as closely as possible real calibration procedures taken up in the measurement laboratories. Finally, the limitations of the presented procedures were presented and discussed.

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Two approaches for realizing traceability in nanoscale dimensional metrology

Cited by 26 publications

References 25 publications

Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

Amorphous Si critical dimension structures with direct Si lattice calibration

Feasibility Study of a Piezo Actuator as a Potential Standard in Calibration for Roundness Instruments

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