2010
DOI: 10.1364/oe.18.005124
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Ultra-thin ultra-smooth and low-loss silver films on a germanium wetting layer

Abstract: We demonstrate a method to fabricate ultra-thin, ultra-smooth and low-loss silver (Ag) films using a very thin germanium (Ge) layer as a wetting material and a rapid post-annealing treatment. The addition of a Ge wetting layer greatly reduces the surface roughness of Ag films deposited on a glass substrate by electron-beam evaporation. The percolation threshold of Ag films and the minimal thickness of a uniformly continuous Ag film were significantly reduced using a Ge wetting layer in the fabrication. A rapid… Show more

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Cited by 246 publications
(161 citation statements)
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“…Optical constants of individual silica and silver films were determined via ellipsometry using a JA Woollam VASE ellipsometer and the inferred optical constants showed good agreement with literature [32,33]. We modeled the dielectric permittivity function of silver as Ag ≈ F C + bound , with F C being the contribution from the free carriers and bound being the contribution of bound or valence electrons.…”
Section: Determining Optical Constantsmentioning
confidence: 65%
See 1 more Smart Citation
“…Optical constants of individual silica and silver films were determined via ellipsometry using a JA Woollam VASE ellipsometer and the inferred optical constants showed good agreement with literature [32,33]. We modeled the dielectric permittivity function of silver as Ag ≈ F C + bound , with F C being the contribution from the free carriers and bound being the contribution of bound or valence electrons.…”
Section: Determining Optical Constantsmentioning
confidence: 65%
“…We modeled the dielectric permittivity function of silver as Ag ≈ F C + bound , with F C being the contribution from the free carriers and bound being the contribution of bound or valence electrons. Free electron motion in the silver is treated with a Drude dispersion while interband transition of bound electrons in the UV are modeled with five Lorentz osscillators as described by Chen et al [33,34]:…”
Section: Determining Optical Constantsmentioning
confidence: 99%
“…This is due to the enhanced surface roughness of the Ag/Ge film, leading to lower optical loss. The achieved transmission was still lower than the theoretical level by the amount of ~15%, which may be attributed to the unwanted absorption incurred by the fabricated Ag mirror [17]. The center wavelength slightly shifted from 900 nm to ~845 nm, as the angle increased from 0 up to 50°.…”
Section: Device Fabrication and Experimental Resultsmentioning
confidence: 82%
“…6. The RMS roughness as measured decreased considerably from 8.4 to 0.54 nm, thereby relieving the optical scattering loss stemming from the uneven surface of the film [17].…”
Section: Device Fabrication and Experimental Resultsmentioning
confidence: 86%
“…The loss arising in the device comes from the intrinsic loss of the metal [13,14] . Apparently, a thinner metal film leads to a lower loss, however, good-quality ultra-thin metal films are difficult to achieve and they have a relatively large imaginary part Im [ε m ] and the dielectric permittivity ε m will not remain constant as it becomes a function of layer thickness [14] . Furthermore, the hyperlens with alternating layers of metal and dielectric differ with the superlens, which only has a single metal layer.…”
mentioning
confidence: 99%