Universal correction procedure for electron-probe microanalysis. II. The absorption correction

Abstract

For pt.I see ibid., vol.18, p.1233 (1985). A new absorption correction is developed which is shown to work well for quantitative analysis of all systems including light elements. It is based upon representing the X-ray depth distributions as a quadrilateral shape defined by the mean depth of X-ray generation and the position and relative height of the peak in the X-ray depth profile. Equations for describing these parameters in terms of target material, incident electron energy, etc. are derived by reference to tracer and Monte Carlo determinations of X-ray depth distributions.

Accurate determination of the Ca:P ratio in rough hydroxyapatite samples by SEM‐EDS, PIXE and RBS—a comparative study

“…The SEM-EDS spectra were fitted using the Oxford Instruments Link code 37,38,39 which is based on a semi-empirical general determination of the depth distribution of the X-ray excitation function due to the collision cascade of the electron beam, utilising both Monte Carlo calculations and an extensive series of measurements of tracer layers of one material in another together with self-supporting thin layers. The accuracy with which this function is estimated depends on the uncertainty in the tracer layer thicknesses (3%) and the demonstrable accuracy of the MC (also about 3%).…”

A characteristic fluorescence correction factor for use in electron probe microanalysis. II. Evaluation of experimental results and comparisons

“…For the purpose of a test of the new secondary fluorescence correction model 135 experimental values have been extracted from a database of 554 measurement data sets presented by Sewell et al [50]. 7b illustrate the effects caused by the choice of différent depth distribution functions both the absorption correction and the fluorescence correction are calculated using a variety of depth [33] (0 -0 -), Ugarte 1 [48] (-·· -), Ugarte 2 [48] (-.…”

Quantitative EPMA of element depth distribution

“…Pouchou and Pichoir used a double parabolic shape [10] or a combination of exponential shapes [11]. In a quadrilateral model [12] ~(z) was approximated by means of two straight lines. In the other works Gaussian E7, [13][14][15] or double partial Gaussian [16] profiles have been used for the O(z) approximation.…”