We demonstrate the production of In 2 Se 3 films as the growth outcome when Bi 2 Se 3 films are deposited using the hot-wall-epitaxy method on the substrates that contain In. The Bi atoms in Bi 2 Se 3 are substituted with the In atoms supplied from the InAs substrates. Despite a large lattice mismatch, α-In 2 Se 3 layers grow semicoherently on InAs(1 1 1). The substitution is induced on the InP substrates only when the substrate surface is roughened. The phase of the resultant In 2 Se 3 depends on the degree of the surface roughness. When the roughness is not strong, layered structures of α-In 2 Se 3 are produced by semicoherent heteroepitaxy not only on (1 1 1) but also on high-index surfaces. On heavily damaged InP substrates, the layers primarily consist of γ -In 2 Se 3 . We show, in addition, that the In-induced substitution causes the incorporation of Ga atoms in the In-Se compounds on (In,Ga)As surfaces.