Viscous damping of microcantilevers with modified surfaces and geometries

Abstract

Articles you may be interested inSurface engineering of the quality factor of metal coated microcantilevers

Air damping of atomically thin MoS2 nanomechanical resonators

“…Beyond pursuing highest possible Q's for the aforementioned applications in vacuum, in wider pressure ranges, quantifying pressure dependences and understanding air damping effects in 2D nanomechanical resonators can also be important for exploring new technological niches in applications such as nerve gas detection, pressure sensing, functionalized surfaces (e.g., "smart skins"), cochlear implants, ultrasonic transducers (for high-resolution imaging/position detection), and miniaturized microphones and speakers spanning wide acoustic bands. 7 To date, pressure dependences and air damping have been widely investigated in conventional resonant microelectromechanical systems (MEMS), such as in doubly clamped beams, [8][9][10][11] cantilevers, [11][12][13][14] torsional paddles, 15 and drumhead membrane 16 resonators, and in various mainstream structural materials (e.g., Si and SiN), demonstrating pressure (p) dependent dissipation processes, with Q $ p À1 and Q $ p À1/2 power laws, in different pressure ranges. [8][9][10][11][12][13][14][15][16] While resonance characteristics of 2D NEMS resonators have been reported, only a few experiments have been conducted to study the dissipation processes such as temperature dependence of Q factors 2,3 and surface losses in 2D devices.…”

“…7 To date, pressure dependences and air damping have been widely investigated in conventional resonant microelectromechanical systems (MEMS), such as in doubly clamped beams, [8][9][10][11] cantilevers, [11][12][13][14] torsional paddles, 15 and drumhead membrane 16 resonators, and in various mainstream structural materials (e.g., Si and SiN), demonstrating pressure (p) dependent dissipation processes, with Q $ p À1 and Q $ p À1/2 power laws, in different pressure ranges. [8][9][10][11][12][13][14][15][16] While resonance characteristics of 2D NEMS resonators have been reported, only a few experiments have been conducted to study the dissipation processes such as temperature dependence of Q factors 2,3 and surface losses in 2D devices. 6 In addition, while resonance frequency shifts due to bulging of graphene membrane has been demonstrated with varying pressure, 17 air damping in such atomically thin NEMS has not yet been investigated.…”

“…One clear distinction of our 2D NEMS from conventional 3D devices is the absence of simple power law dependence in the Q-p relation. In 3D MEMS, where f res depends little on pressure, [10][11][12]14 Q $ p À1 in the FMF regime, and at higher p, Q $ p À1/2 for viscous damping. In our 2D resonators, f res shift significantly with p, hence Q does not simply follow the well-known Q $ p À1 or Q $ p À1/2 power law.…”

3D Core–Shell TiO2@MnO2 Nanorod Arrays on Microcantilevers for Enhancing the Detection Sensitivity of Chemical Warfare Agents

“…Adsorption and interaction of molecules on the sensor surface are detected by monitoring nanomechanical changes either through the microcantilever deflection (static mode) or the resonance frequency shift (dynamic mode). The dynamic mode offers an overall high resolution, and the shift in the resonance frequency is correlated to the mass change during the molecular adsorption. ,, Several readout techniques such as optical, piezoresistive, piezoelectric, or capacitive methods are used to measure the resonance frequency shift. Even if the optical readout technique requires a bulky setup, the installation of a compatible gas chamber, and keeping the laser beam reflection from the microcantilever after chemical synthesis of nanostructures, microcantilevers with an optical readout have the advantages of (i) being readily available from sellers and being compatible with AFM systems, (ii) being commonly used and having a high precision and a high sensitivity, and (iii) being more convenient to realize chemical syntheses under harsh conditions because they do not require connectors or actuator as in piezoresistive microcantilevers.…”

Theoretical model and experimental study on environmental dissipation mechanism of tapping mode atomic force microscope

“…One is internal friction of materials due to the dynamic deformation of the cantilever 5,6 . Another one mechanism is environmental dissipation (including viscous damping, squeeze film damping and liquid bridge force) due to the cantilever oscillation in the surrounding atmosphere 7–12 . The last one is the adhesion hysteresis caused by the interaction between the tip‐sample 8,13–15 .…”