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Mechanical stress related hot-carrier effects will be investigated experimentally by imposing mechanical stress on the Si chip and analytically by using a three-dimensional simulator. The main viewpoints are: (i) applied stress direction dependence. (ii) device scaling. and (iii) degradation mechanisms.The generation of surface states by hot carrier is found to decrease under compressive stress, while V,, shift is enhanced. Consequently, mechanical stress might cause the variation of bond length of Si-0, Si-OH, Si-H, resulting in the enhancement of electron trapping efficiency. In terms of scalability, mechanical stress-induced hot-carrier effect becomes less with scaling of the channel length, L which coincides with the simulated mechanical stress ux which decreases as L is reduced. This is probably due to a spreading effect of localized stress at the gate edge for scaled MOS devices, and will be a positive effect for lateral device scaling.Thus, the mechanical stress was found to influence differently on carrier trapping and N.. generation. From now on, reliability problems such as TDDB. junction leaks and so forth will have to be re-examined as mechanical stressrelated phenomena, which will lead to the realization of more reliable ULSIs.

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