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A profitable mass production of Organic Light Emitting Diode (OLED) displays needs a new type of manufacturing equipment. We present the concept of a vertical In-Line machine equipped with linear etch and linear evaporation sources for organic materials(small molecules) and sputter as well as evaporation sources for metals and ITO.

The influence of process power, process pressure, discharge voltage and film thickness on electrical and morphological properties of low resistivity ITO films is presented. SEM images and AFM measurements show that flat ITO films for light emitting polymer applications with a RMS roughness of less than 1 nm can be prepared. The flat surface structure also improves the optical transmittance of ITO films being beneficial for light emitting polymer applications. The performance of light emitting polymer display devices using ultra-flat ITO films is correlated to the ITO process variation.