Cross-linked polyethylene (XLPE) is often manufactured as pipe, film and foam products and used as electric insulation material. To improve the dielectric properties of XLPE film, CF4 dielectric barrier discharge (DBD) is applied as a surface modification method. The surface of XLPE film was modified at the low pressure of 1 kPa with different treatment time (15s, 30s, 60s, 120s, 240s and 480s). Electrical and optical characteristics are observed during DBD process, including applied voltage, measured current, photograph and emission spectra. Then, the surface properties, which are hydrophobicity, chemical composition, surface morphology, trap depth, dielectric loss and AC breakdown voltage, have been measured or observed by water contact angle test, X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM), isothermal relaxation current (IRC), frequency domain spectroscopy (FDS) and withstand voltage test. After the surface modification, the water contact angle, trap depth and breakdown voltage increase first and then decrease with treatment time extending. Meanwhile, the dielectric loss has an opposite trend, which represents better dielectric properties. The reason is that fluorine can reduce the surface energy, which can significantly influence the water contact angle. Better hydrophobicity can restrain the accumulation of outside pollution on the surface. Moreover, fluorine has strong electronegativity, so amorphous crystalline and impurities interface trap depth become deeper and the dielectric loss becomes lower. Therefore, appropriate DBD treatment conditions can apparently improve XLPE dielectric properties.