No abstract

No abstract

No abstract

A kind of distributed coplanar waveguide (CPW) phase shifter based on LaAlO 3 substrates is designed and fabricated in this paper. The Ba 0.4 Sr 0.6 TiO 3 (BST) thin films employed in the circuits are deposited by RF magnetron sputtering, and then annealed at 800°C for 30 min in air. The dielectric tunability, loss tangent of the BST films are respectively 43.7% and 0.017 at 100 kHz and 30 V, the leakage current is approximately 1× 10 −9 A/cm 2 at zero bias voltage. The CPW phase-shifter designed is subsequently fabricated in order to obtain a 360°phase shift at 30 GHz with a moderate bias voltage. The maximal phase shift is 372°at 22.5 GHz with a bias voltage of 40 V.