We investigate amorphous silicon ͑a-Si: H͒ thin film solar cells in the n-i-p or substrate configuration that allows the use of nontransparent and flexible substrates such as metal or plastic foils such as polyethylene-naphtalate ͑PEN͒. A substrate texture is used to scatter the light at each interface, which increases the light trapping in the active layer. In the first part, we investigate the relationship between the substrate morphology and the short circuit current, which can be increased by 20% compared to the case of flat substrate. In the second part, we investigate cell designs that avoid open-circuit voltage ͑V oc ͒ and fill factor ͑FF͒ losses that are often observed on textured substrates. We introduce an amorphous silicon carbide n-layer ͑n-SiC͒, a buffer layer at the n / i interface, and show that the new cell design yields high V oc and FF on both flat and textured substrates. Furthermore, we investigate the relation between voids or nanocrack formations in the intrinsic layer and the textured substrate. It reveals that the initial growth of the amorphous layer is affected by the doped layer which itself is influenced by the textured substrate. Finally, the beneficial effect of our optical and electrical findings is used to fabricate a-Si: H solar cell on PEN substrate with an initial efficiency of 8.8% for an i-layer thickness of 270 nm.

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The deposition of a stack of amorphous (a-Si:H) and microcrystalline (μc-Si:H) tandem thin film silicon solar cells (micromorph) requires at least twice the time used for a single junction a-Si:H cell. However, micromorph devices have a higher potential efficiency, thanks to the broader absorption spectrum of μc-Si:H material. High efficiencies can only be achieved by mitigating the nanocracks in the μc-Si:H cell and the light-induced degradation of the a-Si:H cell. As a result, μc-Si:H cell has to grow on a smooth substrate with large periodicity (>1 μm) and the a-Si:H cell on sharp pyramids with smaller feature size (∼350 nm) to strongly scatter the light in the weak absorption spectra of a-Si:H material. The asymmetric intermediate reflector introduced in this work uncouples the growth and light scattering issues of the tandem micromorph solar cells. The stabilized efficiency of the tandem n-i-p/n-i-p micromorph is increased by a relative 15% compared to a cell without AIR and 32% in relative compared to an a-Si:H single junction solar cells. The overall process (T<200 °C) is kept compatible with low cost plastic substrates. The best stabilized efficiency of a cell deposited on polyethylene-naphthalate plastic substrate is 9.8% after 1000 h of light soaking at Voc, 1 sun, and 50 °C.

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