In this work, we develop SiOx/poly‐Si carrier‐selective contacts grown by low‐pressure chemical vapor deposition and boron or phosphorus doped by ion implantation. We investigate their passivation properties on symmetric structures while varying the thickness of poly‐Si in a wide range (20‐250 nm). Dose and energy of implantation as well as temperature and time of annealing were optimized, achieving implied open‐circuit voltage well above 700 mV for electron‐selective contacts regardless the poly‐Si layer thickness. In case of hole‐selective contacts, the passivation quality decreases by thinning the poly‐Si layer. For both poly‐Si doping types, forming gas annealing helps to augment the passivation quality. The optimized doped poly‐Si layers are then implemented in c‐Si solar cells featuring SiO2/poly‐Si contacts with different polarities on both front and rear sides in a lean manufacturing process free from transparent conductive oxide (TCO). At cell level, open‐circuit voltage degrades when thinner p‐type poly‐Si layer is employed, while a consistent gain in short circuit current is measured when front poly‐Si thickness is thinned down from 250 to 35 nm (up to +4 mA/cm2). We circumvent this limitation by decoupling front and rear layer thickness obtaining, on one hand, reasonably high current (JSC‐EQE = 38.2 mA/cm2) and, on the other hand, relatively high VOC of approximately 690 mV. The best TCO‐free device using Ti‐seeded Cu‐plated front contact exhibits a fill factor of 75.2% and conversion efficiency of 19.6%.
In this work, the application of carrier-selective passivating contacts based on tunneling silicon-dioxide and ion-implanted poly-Si in front and rear contacted Si solar cells is presented. This paper addresses the need to minimize the contact recombination while still keeping high short circuit current. We aim to solve such trade-off with a novel solar cell architecture called Passivated Rear and Front ConTacts (PeRFeCT). Such design employs a selective passivating contact combined with standard homojunction on the front side in order to minimize contact recombination, while achieving high optical transparency and a full area passivating contact on the rear side. The opto-electrical modeling of this front/rear contacted architecture indicates a potential efficiency above 26%. As technology demonstration, we also report on the optimization of front surface field and processing of 2.8 Â 2.8 cm 2 wide solar cells leading to a 20.1% conversion efficiency.
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