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Nano-patterns made of poly(methyl methacrylate) (PMMA) were fabricated on silicon wafer using a capillarity-directed soft lithographic technique. Patterns with three different aspect ratios were investigated for their adhesion and friction properties at nano-scale and for friction at micro-scale. The patterned samples exhibited superior tribological properties, at both these scales when compared to those of flat PMMA thin films.

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An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon (Si-DLC) film slid against a steel ball. The films were deposited on Si (1 0 0) wafers by a radio frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig were performed in vacuum, dry air and ambient air. It was observed that coefficient of friction decreased as the environment changed from vacuum to dry air. Results also showed that low and stable friction related closely to the smoothening of track surfaces and the formation of silicon-rich oxide debris.