In recent years, micro-lens arrays (MLAs) have become important elements of optical systems. One function of MLAs is to create a uniform intensity of light. Compared with one-sided MLAs, the uniformity of light intensity increases with double-sided MLAs. MLAs fabricated by glass can be used in higher temperature environments or in high-energy systems. Glass-based MLAs can be fabricated by laser machining, photolithography, precision diamond grinding process and precision glass molding (PGM) technologies, but laser machining, photolithography and precision diamond grinding process technologies are not the perfect approach for mass production. Therefore, this paper proposes a method to fabricate a mold by laser micro-machining and a double-sided MLA by a PGM process. First, a micro-hole array was fabricated on the surface of a silicon carbide mold. A double-sided MLA using two molds was then formed by a PGM process. In this paper, the PGM process parameters including molding temperature and molding force are discussed. Moreover, the profile of a double-sided MLA is discussed. Finally, a double-sided MLA with a diameter of 20 mm, and lenses with a height of 52 μm, a radius of 851 μm and a pitch of 700 μm were formed on glass.

This study presents a new method of fabricating and integrating micro cylindrical lenses (MCLs) into an inplane micro optical system. The characterizations of MCLs, which are made of SU-8 negative photoresist, are also reported in this study. Many demands, especially for arbitrary lens shapes and accurate alignment, can be met by the proposed method. The measurements of size revealed that SU-8 MCLs swelled, but the amount of swelling maintained constant for at least six months. Two factors were demonstrated to govern the swelling of SU-8 structures, and can be compensated for in the design of the mask. The SU-8 MCLs are shown to exhibit function with a satisfactory optical property. Fluorescence is collimated and focused in a micro channel, demonstrating the potential of MCLs to detect laser-induced-fluorescence (LIF). The fluorescence behavior of SU-8 is also examined herein. The advantages of rapid prototyping and easy integration of SU-8 MCLs have a range of many applications, especially in in-plane micro optical configurations.

No abstract

No abstract

No abstract