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A high-resolution laboratory reflectometer designed for operation in the soft x-ray (SXR) and extreme ultraviolet (EUV) ranges is described. High spectral resolution, up to 0.028 nm, in a wide spectral range is achieved due to the Czerny–Turner monochromator. A laser plasma generated by irradiating a solid-state target with a focused laser beam (wavelength 1.06 µm, pulse energy 0.5 J, duration 4 ns, and pulse repetition rate 10 Hz) is used as a source of SXR and EUV radiation. The goniometer allows the study of curved optical elements with an aperture up to NA = 0.5 and a diameter of up to 500 mm. The methods providing high efficiency of the optical system and spectral resolution in a wide range of wavelengths are described in detail. The problem of taking into account high orders in the recorded spectra of a laser plasma is discussed. A comparison of the measurement results with the described reflectometer and the optics beamline at the BESSY-II synchrotron is given.

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We have measured the absolute intensities of the spectral lines of Kr, Ar, and O ions (CO2 gas), which are of interest for reflectometry, microscopy, and lithography in the wavelength range of 10 – 18 nm. We have used pulsed excitation by an Nd : YAG laser with an output wavelength λ = 1064 nm, a pulse energy of 0.8 J, a pulse duration of 5.2 ns and a pulse repetition rate of 10 Hz. The targets are formed during gas outflow through a pulsed supersonic conical nozzle for an inlet gas pressure of 3.5 bar. A spectrometer based on X-ray multilayer mirrors and its calibration procedure are described in detail. The absolute intensities of the spectral lines of Kr IX (λ = 11.5 nm; number of photons: N = 9.3 × 1012 photons pulse−1), Ar VIII (λ = 13.84 nm, N = 3 × 1012 photons pulse−1), and O VI (λ = 12.98 nm, N = 5.17 × 1012 photons pulse−1). The results are compared with the data obtained for Xe ions under the same experimental conditions at the same wavelengths.

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