The two methods of the formation of the silicon-on-insulator (SOI) local structures have been proposed. The first one is based on the stimulated lateral epitaxial growth and planarization of Si monocrystal film. The second one is based on local thermal oxidation of Si buried layer through horizontal tunnels. The obtained SOIstructures are used in a base matrix crystal fabrication technology for the construction of micro-systems. It is proposed to add to elements of a base crystal of a matrix of cells of field emission micro-cathodes with control circuits. The fabrication technology and the layout of a field emission micro-cathode cell with control high-voltage SOI MOS-transistor has been developed. The computer simulation of high-voltage SOI MOS-transistor static characteristics has been performed.

In this paper the results of architecture development, layout designof analytical microsystem-on-chip with the structures "silicon-on-insulator" (SOI) and its elements schemotechnical computer simulation for determine their electrical and time characteristics are presented.

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The paper presents the results of circuit design and computer simulation of signal transducers for integrated circuits and silicon-on-insulator (CMI) ICs.

The paper analyzes the existing non-invasive methods and tools for measuring and monitoring heart rate (HR), glucose saturation and human blood glucose level (BGL), shows ways of improving them to increase accuracy and expand the number of parameters obtained by these methods, which became the basis for creating a hybrid microsystem device for biomedical applications. A block diagram of the microsystem and a prototype of software and hardware tools for continuous monitoring of heart rate, BGL, saturation level and other blood parameters by photoplethysmography (PPG) have been developed. The proposed algorithms and tools provide primary processing of signals from optical sensors, calculation of pulse wave parameters, data transmission to mobile devices and a remote server, the possibility of calibration during operation based on research results.