In this paper, an original design of a polysilicon loop-shaped microheater on a 1-m thin-stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation and very low power consumption (20 mW for heating at 400 C). Moreover, the use of completely CMOS compatible tetramethyl ammonium hydroxide-based bulk-micromachining techniques allows an easy, smart gas sensor integration in SOI-CMOS technology.

No abstract

No abstract

No abstract

A low-cost, non-destructive and flexible technique based on thermoreflectometry is presented in this paper to map the temperature of running devices integrated on a silicon chip. The analysed device is a micromachined gas sensor using silicon-on-insulator technology (SOI). The interests and limitations of the proposed optical technique are described and compared with commonly used methods in microelectronics. Moreover, experimental results of thermal mapping for micromachined gas sensors are also compared with numerical simulations. From the measured temperature distribution over the entire active area of micromachined gas sensors, optimized designs can be proposed for avoiding hot spots that degrade the performance of the integrated gas sensors.