Deep-UV (DUV) laser was used to directly write indium-gallium-zinc-oxide (IGZO) precursor solution and form micro and nanoscale patterns. The directional DUV laser beam avoids the substrate heating and suppresses the diffraction effect. A IGZO precursor solution was also developed to fulfill the requirements for direct photopatterning and for achieving semi-conducting properties with thermal annealing at moderate temperature. The DUV-induced crosslinking of the starting material allows direct write of semi-conducting channels in thin-film transistors but also it improves the field-effect mobility and surface roughness. Material analysis has been carried out by XPS, FTIR, spectroscopic ellipsometry and AFM and the effect of DUV on the final material structure is discussed. The DUV irradiation step results in photolysis and a partial condensation of the inorganic network that freezes the sol-gel layer in a homogeneous distribution, lowering possibilities of thermally induced reorganization at the atomic scale. Laser irradiation allows high-resolution photopatterning and high-enough field-effect mobility, which enables the easy fabrication of oxide nanowires for applications in solar cell, display, flexible electronics, and biomedical sensors.

No abstract

We investigate the composition of the DUV-patterned sol-gel indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) and observe a significant zinc loss effect during developing when the DUV exposure is insufficient. The zinc loss, however, is beneficial for increasing the mobility. Reducing zinc to indium composition ratio from 0.5 to 0.02 can effectively increase mobility from 0.27 to 7.30 cm 2 V -1 s -1 when the gallium to indium ratio is fixed as 0.25 and the post annealing process is fixed as 300 °C for 2 h. On the other hand, an IGO TFT fails to deliver a uniform film and a reproducible TFT performance, revealing the critical role of zinc in forming homogeneous IGZO TFTs.

No abstract

A NO sensing tip is made by inserting two parallel optical fibers inside a poly 2-hydroxyethyl methacrylate (PolyHEMA) hydrogel waveguide mixed with the probe molecule 1, 2-Diaminoanthraquinone (DAQ). There is a length difference of 1 mm between the two fibers, and the light has to propagate through the difference from the short fiber to the long fiber. The total cross section area of the active hydrogel waveguide embedded with the fibers is only 3mm x 1.2 mm. For practical use the tip is housed in a needle for mechanical protection and the sensing tip is able to detect aqueous NO concentration around 1 μM with time resolution about 5 minutes. Such a sensing tip can be used to monitor the medical conditions inside the brain after a stroke or a brain injury.