No abstract

No abstract

No abstract

Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO3/Pr0.7Ca0.3MnO3/SrRuO3 nanometer-sized trilayers from SrTiO3(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching behavior of the SrRuO3 film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, μ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.PACS: 81.07.-b; 68.60.-p; 68.37.Lp; 81.16.Dn.

Planar X‐ray refractive lenses with parabolic surface profile, and in crossed geometry to provide 2D focusing, are fabricated from SU‐8 polymer using the LIGA process and deep X‐ray lithography technology. A transmission X‐ray microscope (TXM) using a condenser and an objective lens based on this type of X‐ray optics was set up at the ESRF beamline BM 5, for photon energies of 17.1 and 18 keV. Test structures made of gold and SU‐8, with different thicknesses, were imaged with this TXM using in‐line phase‐contrast, with X‐ray magnification factors of 13–20, spatial resolution between 0.2 and 0.3 µm and exposure times around 1 s. The advantages of a TXM based on refractive SU‐8 planar crossed condenser and objective and the optimisation of the optical scheme and of the condenser focusing profile are discussed. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)