Microstructures of amorphous In–Ga–Zn–O (a-IGZO) thin films of different densities were analyzed. Device-quality a-IGZO films were deposited under optimum conditions, e.g., the total pressure P tot = 0.55 Pa produced high film densities of ∼6.1 g/cm3, while a very high P tot = 5.0 Pa produced low film densities of 5.5 g/cm3. Both films formed uniform high-density layers in the vicinity of the glass substrate, 10–20 nm in thickness depending on P tot, while their growth mode changed to a sparse columnar structure in thicker regions. X-ray reflectivity and in situ spectroscopic ellipsometry provided different results on densification by post deposition thermal annealing; i.e., the latter has a higher sensitivity. High-Z-contrast images obtained by high-angle annular dark-field scanning transmission electron microscopy were also useful for detecting nanometer-size non uniformity even in device-quality a-IGZO films.

A high concentration of vanadium (V) has toxic effects on human and animals and is one of environmental pollutants. In the present study, we have conducted a fundamental study using cultured Vero cells from monkey kidney for the future environmental monitoring. Orthovanadate (VAN), one of V compounds, of 10(-10) and 10(-8) M did not affect the cell growth although the higher concentration of above 10(-6) M VAN inhibited the cell growth accompanied with the decrease in cell numbers and morphological changes. Given that the washing method with ice-cold Li is also effective for determination of the cellular Na content, we used this method for the determination of the V content of the Vero cells. The V distributions in Vero cell; in the 10(-3) M VAN solution, extracellular and intracellular were obtained as 1:0.564:0.036 and 1:0.662:0.098 at 60 and 120 min after the treatment of VAN. The intracellular V content was 10% of the applied concentration of VAN. Consequently, it was suggested that V concentration of 10(-7) and 10(-6) M in the tissue and environment, respectively, might become the threshold concentration; a criterion of the environmental contamination when we carry out environmental monitoring.

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