Abstract. The paper presents the results of computer simulation of silicon wafers under scribe loading conditions. Finite Element (FE) analysis was applied to estimate a value of stresses and spread of defect zone around scratch line. It was revealed that due to impact of diamond tip, a complex stress-strain state is produced in the wafer, which is related to the appearance of defect zones in silicon. The approved methods of cutting simulation could be employed for various types of brittle materials to predict defects and damage of crystal during separation processing.
В данной работе средствами программы DEFORM-2D исследовано напряженное состояние инструмента при волочении упрочненного сплава Pt-Ni эквиатомного состава при комнатной температуре. Рассмотрены различные варианты геометрии алмазного инструмента при неизменных габаритных размерах оправы. Обоснована принципиальная возможность снизить жесткость волоки без изменения параметров технологического процесса.
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