Biological cells are characterized by highly complex phenomena and processes that are, to a great extent, interdependent. To gain detailed insights, devices designed to study cellular phenomena need to enable tracking and manipulation of multiple cell parameters in parallel; they have to provide high signal quality and high spatiotemporal resolution. To this end, we have developed a CMOS-based microelectrode array system that integrates six measurement and stimulation functions, the largest number to date. Moreover, the system features the largest active electrode array area to date (4.48×2.43 mm 2 ) to accommodate 59,760 electrodes, while its power consumption, noise characteristics, and spatial resolution (13.5 μm electrode pitch) are comparable to the best state-of-the-art devices. The system includes: 2,048 action-potential (AP, bandwidth: 300 Hz to 10 kHz) recording units, 32 local-field-potential (LFP, bandwidth: 1 Hz to 300 Hz) recording units, 32 current recording units, 32 impedance measurement units, and 28 neurotransmitter detection units, in addition to the 16 dual-mode voltage-only or current/voltagecontrolled stimulation units. The electrode array architecture is based on a switch matrix, which allows for connecting any measurement/stimulation unit to any electrode in the array and for performing different measurement/stimulation functions in parallel. Index Termshigh-density microelectrode array (HD-MEA); neural interface; multi-functionality; high channel count; low noise; low power; switch matrix; extracellular recording and stimulation; neurotransmitter detection; impedance spectroscopy; pre-charging; pseudo-resistor I IntroductionElectrogenic cells, such as neuronal, cardiac, and pancreatic cells are capable of generating and transmitting electrical signals. The flow of ions through the cell membrane generates changes in electrical potentials that can be measured using standard electronic circuitry. Apart from electrical signals, cells also use chemical compounds for signaling, as it is the case in neuronal synapses (contacts between neuronal cells). The chemicals that transmit signals across the synaptic cleft, so-called neurotransmitters, play a significant role in brain diseases, such as schizophrenia, Alzheimer's, and Parkinson's disease [1]; their presence is detectable by means of electrochemical methods, typically, cyclic voltammetry, [2]- [4]. To study cell network dynamics, a bidirectional interaction, which also includes electrical stimulation of cells, is desired. To ensure precise and selective stimulation of individual neurons, characterization of the electrodes [5], the cell-electrode attachment, and the cell morphology [6] is first performed, typically by means of impedance spectroscopy [7]. This In this paper, we present a high-density MEA system that allows performing multiple measurement/stimulation functions in parallel (Fig. 1). The implemented switch-matrix approach [18], [22] allows connecting any electrode to any of the measurement/stimulation channels. Moreover,...

A monolithic multi-functional CMOS microelectrode array system was developed that enables label-free electrochemical impedance spectroscopy of cells in-vitro at high spatiotemporal resolution. The electrode array includes 59,760 platinum microelectrodes, densely packed within a 4.5 mm×2.5 mm sensing region at a pitch of 13.5 μm. 32 on-chip lock-in amplifiers can be used to measure the impedance of any arbitrarily chosen subset of electrodes in the array. A sinusoidal voltage, generated by an on-chip waveform generator with a frequency range from 1 Hz to 1 MHz, was applied to the reference electrode. The sensing currents through the selected recording electrodes were amplified, demodulated, filtered and digitized to obtain the magnitude and phase information of the respective impedances. The circuitry consumes only 412 μW at 3.3 V supply voltage and occupies only 0.1 mm2, for each channel. The system also included 2048 extracellular action-potential recording channels on the same chip. Proof of concept measurements of electrical impedance imaging and electrophysiology recording of cardiac cells and brain slices are demonstrated in this paper. Optical and impedance images showed a strong correlation.

Due to their label-free and noninvasive nature, impedance measurements have attracted increasing interest in biological research. Advances in microfabrication and integrated-circuit technology have opened a route to using large-scale microelectrode arrays for real-time, high-spatiotemporal-resolution impedance measurements of biological samples. In this review, we discuss different methods and applications of measuring impedance for cell and tissue analysis with a focus on impedance imaging with microelectrode arrays in in vitro applications. We first introduce how electrode configurations and the frequency range of the impedance analysis determine the information that can be extracted. We then delve into relevant circuit topologies that can be used to implement impedance measurements and their characteristic features, such as resolution and data-acquisition time. Afterwards, we detail design considerations for the implementation of new impedance-imaging devices. We conclude by discussing future fields of application of impedance imaging in biomedical research, in particular applications where optical imaging is not possible, such as monitoring of ex vivo tissue slices or microelectrode-based brain implants.

Here, we present 2048 low-noise, low-offset, and low-power action-potential recording channels, integrated in a multi-functional high-density microelectrode array. A resistively loaded open-loop topology has been adapted for the first-stage amplifier to achieve 2.4 µVrms noise levels at low power consumption. Two novel pseudo-resistor structures have been used to realize very low HPF corner frequencies with small variations across all channels. The adjustability of pseudo resistors has been exploited to realize a "soft" reset technique that suppresses stimulation artifacts so that the amplifiers can recover from saturation within 200 µs. The chips were fabricated in a 0.18 µm 6M1P CMOS process, and measurement results are presented to show the performance of the proposed circuit structures and techniques.

We present a CMOS-based high-density microelectrode array (HD-MEA) system that enables high-density mapping of brain slices in-vitro with multiple readout modalities. The 4.48×2.43 mm 2 array consists of 59,760 micro-electrodes at 13.5 µm pitch (5487 electrodes/mm 2 ). The overall system features 2048 action-potential, 32 local-field-potential and 32 current recording channels, 32 impedance-measurement and 28 neurotransmitter-detection channels and 16 voltage/ current stimulation channels. The system enables real-time and label-free monitoring of position, size, morphology and electrical activity of brain slices.