Articles you may be interested inHigh-throughput fabrication of compact and flexible bilayer nanowire grid polarizers for deep-ultraviolet to infrared range J.

Two reconfigurable optical add-drop multiplexers, operating in the second or third telecom window, as well as a 1x4x4 reconfigurable λ -router operating in the second telecom window, are demonstrated. The devices have a footprint less than 2 mm 2 and are based on thermally tunable vertically coupled microring resonators fabricated in Si 3 N 4 /SiO 2 .

The aberration monitor allows independent determination of spherical, coma, astigmatism and three point in a single experiment using existing equipment. The monitor consists of a circular phase object, with a diameter of ' A/NA and a phase depth of A/2. Due to the relative large diameter, the image prints as a narrow ring into the resist. Without aberrations its contours are concentric circles. Aberrations deform the ring in a characteristic way. A detailed analysis of the ring shape through focus identifies the aberrations of the projection lens. A linear aberration model is compared with simulations. Experimental results of various aberrations are shown and are correlated to line width measurements and interferometric lens data.

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