We present a technique for local growth of high-resolution, high-aspect-ratio magnetic tips and thin adherent magnetic cap coatings on top of batch fabricated scanning force microscopy silicon tips. A focused electron beam of a scanning electron microscope is used for decomposition of a directed cobalt carbonyl vapor flux. Exposure parameters determine the tip geometry and tip length. Deposits consist of cubic Co clusters of 2–5 nm in size dispersed in a stabilizing carbonaceous matrix. Magnetic force microscope sensors having magnetic tip apex diameters between 50 and 240 nm were produced. Tracks of magnetic transitions written in recording media of hard disks were used to characterize tip performance.

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Large-field ion-optics has been developed for reduction printing. Sub-100nm ion projection direct-structuring (IPDS) of patterned magnetic media discs has been demonstrated, extending over 17mm diameter exposure fields, in a single exposure. First results of IPDS patterning of nanocomposite resist material are presented. Information about a novel 200x reduction projection focused ion multi-beam (PROFIB) tool development is provided. Further IPDS nanotechnology applications are discussed.

Scanning probe microscope experiments are presented in which thin magnetostrictive films deposited on top of micrometer-sized magnetic write heads as used in magnetic hard disk drives, are used to visualize their emanating magnetic field. The magnetostrictive expansion owing to magnetic writing fields is discussed, together with the transduction mechanisms that lead to the vertical and lateral contrast observed. Experimental results verify that the techniques described have a lateral resolution in the realm of 100 nm.

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