We have developed a diaphragm piezoelectric microactuator. The diaphragm consists of a
Pb(Zr, Ti)O3 (PZT) thin film, electrode layers, an isolation layer and a Si substrate. The diaphragm
is deflected by transverse stress in the PZT thin film which is fabricated by a sputtering and
annealing process. The PZT thin film has a piezoelectric coefficient d
31 of -100 pC/N, which is
comparable to that of bulk PZT. A diaphragm deflection of 3 µ m was obtained at an electric field
of 16 V/µm.
Highly miniaturized optical scanner integrated with a photo detector has been developed for miniaturization of scanning type of optical sensors. The scanner is fabricated by silicon micromachining technologies and is driven by a piezoelectric actuator. It is capable of two dimensional scanning and photo detection. The scanning angle is over 40 deg. x 30 deg. and the photo detecting sensitivity is 0.49 AIW for 680 nm wavelength light.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.