We study the ON-OFF switching mechanism of oxide-based resistive–random–access–memories using theoretical calculations. Electron deficient vacancies (VO) up to 1+ charge states would stabilize a cohesive filament, while further electron removal will stabilize the disrupted VO configurations with 2+ charges. The VO cohesion-isolation transition upon carrier injection and removal is shown to be a strong driving force in the ON-OFF switching process. We also propose that bipolar or unipolar behavior is determined by how the carriers are injected into VO. The control of the carrier injection by the electrode material selection is essential for desired bipolar switching.

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Post-deposition annealing was investigated for hafnium silicate films deposited on Si substrates by atomic layer deposition. Annealing in NH3 at 750°C incorporated 13 At.% nitrogen in hafnium silicate, and hysteresis significantly depended on film thickness. In contrast, annealing in N2 at 950°C suppressed hysteresis and its dependence on the film thickness. In addition, effective mobility and positive bias temperature instability were improved by N2 annealing of as-deposited hafnium silicate films. Finally, additional N2 annealing following NH3 annealing was effective to obtain highly dense hafnium silicate films with good mobility and optimized nitrogen incorporation.

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