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High-power electrostatic microactuators using LIGA process have been fabricated. Comb drive type actuators and a wobble motor were designed and fabricated. A basic structure of the microactuators was composed of movable and ®xed electrodes of Ni, a sacri®cial layer of SiO 2 and a Si substrate, and carried out by one mask process. As design rules, a minimum resist width of 2 lm, resist height of 120 lm, maximum width of movable parts of 10 lm, minimum width of ®xed parts of 40 lm and driving voltage of about 100 V, were decided. A 120 lmthick PMMA resist was formed on a Si substrate by a casting method. The PMMA was exposed using a compact SR source``AURORA'', using an X-ray mask with 7 lmthick Au absorber on a 2 lm-thick poly-Si membrane. The exposed PMMA was developed by a developer. Ni microstructures with 100 lm-height, 2 lm-minimum width, 2 lm-minimum gap, and then maximum aspect ratio of 50, were made by electroforming. Ni microstructures used for movable electrodes were separated from the substrate by lateral etching of SiO 2 . After lateral etching of SiO 2 , Au wires were bonded to electrodes. Actuation of the comb drive type actuator and rotation of the wobble motor were con®rmed. The applied voltage to the comb drive actuator and the wobble motor were 65 and 125 V.

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