We report for the first time two typical phase coherence lengths in highly confined silicon waveguides fabricated in a standard CMOS foundry's multi-project-wafer shuttle run in the 220nm silicon-on-insulator wafer with 248nm lithography. By measuring the random phase fluctuations of 800 on-chip silicon Mach-Zehnder interferometers across the wafer, we extracted, with statistical significance, the coherence lengths to be 4.17 ± 0.42 mm and 1.61 ± 0.12 mm for single mode strip waveguide and rib waveguide, respectively. We present a new experimental method to quantify the phase coherence length. The theory model is verified by both our and others' experiments. Coherence length is expected to become one key parameter of the fabrication non-uniformity to guide the design of silicon photonics.
A new high density, high performance radiation hardened, reconfigurable Field Programmable Gate Array (FPGA) is being developed by Achronix Semiconductor and BAE Systems for use in space and other radiation hardened applications. 12 The reconfigurable FPGA fabric architecture utilizes Achronix Semiconductor novel picoPIPE technology and it is being manufactured at BAE Systems using their strategically radiation hardened 150 nm epitaxial bulk CMOS technology, called RH15. Circuits built in RH15 consistently demonstrate megarad total dose hardness and the picoPIPE asynchronous technology has been adapted for use in space with a Redundancy Voting Circuit (RVC) methodology to protect the user circuits from single event effects.
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