A terraced scanning super conducting quantum interference device susceptometer with submicron pickup loops A superconducting electron storage ring fully dedicated to x-ray lithography has been deveiope

A normal-conducting accelerating ring (NAR) has been constructed with a Chasman–Green-type lattice. The NAR has two basic aims. One aim is to prove the feasibility of the novel accelerating and storage scheme, in which the NAR accelerates the injected 15-MeV electrons to the final energy of 800 MeV, and directly stores them. The other aim is to make the NAR a multipurpose ring. That is, it acts as a booster for the superconducting storage ring, and it supplies the synchrotron radiation with the critical wavelength, 20.2 A. To achieve a high beam current, particular considerations have been taken with injection, rf system, magnetic field tracking, and vacuum formation. The NAR has experienced acceleration and storage at the final energy, 800 MeV. The initial beam current is about 20 mA in the 800 MeV storage mode.

No abstract

An X-ray exposure system has been built aiming at 1 µm pattern replication, which will operated automatically. On the basis of X-ray attenuation analysis, Si–K radiation was chosen. A high power (more than 20 kW input) X-ray source has been equipped with a water cooled rotary target. For alignment, precise mask-wafer displacement detection by vibration method and precise three dimensional aligning mechanism have been adopted. Detection resolution less than ±0.1 µm and mechanism step resolution less than 0.01 µm have been obtained. Light transparent X-ray mask consisting of Si3N4 film has been developed and in use. Dry etching temperature has been lowered to 50°C, which permits the use of heat feeble, highly sensitive resists. The system has been adopted to the fabrication of various devices such as 1 µm magnetic bubble devices, MOS ring oscillator and so on.

No abstract