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A KrF (250 nm) excimer laser radar system design has been developed with a transmitter waveform suitable for producing image, range and Doppler velocity measurements.The short wavelength results in desirable optic sizes (1 /A scaling) and high Doppler velocity sensitivity (a scaling). The several microsecond pulse length, in conjunction with frequency stable operation, allows measurements to be made with the narrow bandwidths necessary for cm /s velocity resolutions (1 /r scaling).Good image quality from rotating targets is produced by the coherent waveform due to temporal speckle reduction and the increased spatial resolution achievable with Doppler processing.

A focused ion beam system has been developed to repair 0.25 urn proximity print X-ray masks. The system is distinguished from a 0.5 urn mask repair tool with the addition of a Micrion designed column, differential laser interferometry, thermal management, and gold deposition hardware.These subsystems contribute to the overall tool performance so that the defects can be located, imaged and repaired to industry specifications. . We discuss the functionality of the repair tool and present results from inspection and repair of actual masks.

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